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Output Characteristics of 4H-SiC Pixel Devices for Radiation Hardened UV CMOS Image Sensors

https://repo.qst.go.jp/records/83680
https://repo.qst.go.jp/records/83680
65dcec5d-aa04-4f24-a33b-bc5bb3ae486c
Item type 会議発表用資料 / Presentation(1)
公開日 2021-10-15
タイトル
タイトル Output Characteristics of 4H-SiC Pixel Devices for Radiation Hardened UV CMOS Image Sensors
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_c94f
資源タイプ conference object
アクセス権
アクセス権 metadata only access
アクセス権URI http://purl.org/coar/access_right/c_14cb
著者 Shin-Ichiro, Kuroki

× Shin-Ichiro, Kuroki

WEKO 1008907

Shin-Ichiro, Kuroki

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Nishigaito, Kenta

× Nishigaito, Kenta

WEKO 1008908

Nishigaito, Kenta

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Meguro, Tatsuya

× Meguro, Tatsuya

WEKO 1008909

Meguro, Tatsuya

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Akinori, Takeyama

× Akinori, Takeyama

WEKO 1008910

Akinori, Takeyama

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Takeshi, Ohshima

× Takeshi, Ohshima

WEKO 1008911

Takeshi, Ohshima

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Tanaka, Yasunori

× Tanaka, Yasunori

WEKO 1008912

Tanaka, Yasunori

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Akinori, Takeyama

× Akinori, Takeyama

WEKO 1008913

en Akinori, Takeyama

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Takeshi, Ohshima

× Takeshi, Ohshima

WEKO 1008914

en Takeshi, Ohshima

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抄録
内容記述タイプ Abstract
内容記述 For the decommissioning of the Fukushima Daiichi Nuclear Power Plant, development of a radiation hardened image sensor is key factor to enhance the decommissioning activities. As an ultra-high radiation hardened image sensor, full-4H-SiC pixel devices with a 4H-SiC UV photo diode and four n-channel MOSFETs were developed and the output characteristics were investigated.
UV photo current characteristics of the photo diode was increased with shortening the wavelength of illumnating light from 370 nm to 290 nm. The maximal quantum efficiency was 30.7% at the wavelength of 290 nm. Additionally, The 4H-SiC pixel device at the dark and illumination states under the exposure of 300 nm UV light were characterized. At the illumination states, the output voltage became higher by increasing illumination intensity. As the results, photo response of developed full-4H-SiC pixel devices were demonstrated.
会議概要(会議名, 開催地, 会期, 主催者等)
内容記述タイプ Other
内容記述 13th Europian Conference on Silicon Carbide and Related Materials (ECSCRM 2020-2021)
発表年月日
日付 2021-10-28
日付タイプ Issued
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