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Toward Realization of Ga2O3 Transistors for Power Electronics Applications

https://repo.qst.go.jp/records/73331
https://repo.qst.go.jp/records/73331
e8f60c28-b2d0-402f-85ea-899ce70c61e0
Item type 会議発表用資料 / Presentation(1)
公開日 2018-08-21
タイトル
タイトル Toward Realization of Ga2O3 Transistors for Power Electronics Applications
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_c94f
資源タイプ conference object
アクセス権
アクセス権 metadata only access
アクセス権URI http://purl.org/coar/access_right/c_14cb
著者 Hoi, Wong Man

× Hoi, Wong Man

WEKO 722501

Hoi, Wong Man

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Nakata, Yoshiaki

× Nakata, Yoshiaki

WEKO 722502

Nakata, Yoshiaki

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Lin, Chia-Hung

× Lin, Chia-Hung

WEKO 722503

Lin, Chia-Hung

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Sasaki, Kohei

× Sasaki, Kohei

WEKO 722504

Sasaki, Kohei

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Morikawa, Yoji

× Morikawa, Yoji

WEKO 722505

Morikawa, Yoji

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Goto, Ken

× Goto, Ken

WEKO 722506

Goto, Ken

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Takeyama, Akinori

× Takeyama, Akinori

WEKO 722507

Takeyama, Akinori

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Makino, Takahiro

× Makino, Takahiro

WEKO 722508

Makino, Takahiro

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Ohshima, Takeshi

× Ohshima, Takeshi

WEKO 722509

Ohshima, Takeshi

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Kuramata, Akito

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WEKO 722510

Kuramata, Akito

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Yamakoshi, Shigenobu

× Yamakoshi, Shigenobu

WEKO 722511

Yamakoshi, Shigenobu

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Murakami, Hisashi

× Murakami, Hisashi

WEKO 722512

Murakami, Hisashi

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Kumagai, Yoshinao

× Kumagai, Yoshinao

WEKO 722513

Kumagai, Yoshinao

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Higashiwaki, Masataka

× Higashiwaki, Masataka

WEKO 722514

Higashiwaki, Masataka

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武山 昭憲

× 武山 昭憲

WEKO 722515

en 武山 昭憲

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牧野 高紘

× 牧野 高紘

WEKO 722516

en 牧野 高紘

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大島 武

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WEKO 722517

en 大島 武

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抄録
内容記述タイプ Abstract
内容記述 β-Ga2O3 is being actively pursued for power switching and harsh environment electronics. State-of-the-art Ga2O3 MOSFETs were realized on unintentionally-doped (UID) β-Ga2O3 (010) epilayers by employing Si-ion implantation doping for the channel and ohmic contacts. Field-plated depletion-mode devices delivered a high off-state breakdown voltage of 755 V, a large drain current on/off ratio of over 109, stable high temperature operation at 300°C, and dispersion-free pulsed output characteristics. Bulk Ga2O3 exhibited high gamma-ray tolerance, while radiation-induced dielectric damage and interface charge trapping limited the overall radiation hardness of these devices. Accumulation-mode normally-off operation was realized by gating a UID β-Ga2O3 (010) channel with low background carrier density. The design and operation of vertical Ga2O3 MOSFETs engineered with a current aperture will also be presented.
会議概要(会議名, 開催地, 会期, 主催者等)
内容記述タイプ Other
内容記述 14th International Conference on Modern Materials and Technologies
発表年月日
日付 2018-06-14
日付タイプ Issued
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