{"_buckets": {"deposit": "29aac735-024e-45c4-aea9-ceacb5378b66"}, "_deposit": {"created_by": 1, "id": "73153", "owners": [1], "pid": {"revision_id": 0, "type": "depid", "value": "73153"}, "status": "published"}, "_oai": {"id": "oai:repo.qst.go.jp:00073153", "sets": ["28"]}, "author_link": ["720826", "720821", "720827", "720828", "720829", "720824", "720830", "720832", "720823", "720822", "720820", "720825", "720831"], "item_10005_date_7": {"attribute_name": "発表年月日", "attribute_value_mlt": [{"subitem_date_issued_datetime": "2019-02-05", "subitem_date_issued_type": "Issued"}]}, "item_10005_description_5": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "In this presentation, we report on development of the soft x-ray laser (SXRL) irradiation system at QST. The SXRL has a wavelength of 13.9 nm, and this laser wavelength is close to the wavelength of extreme ultraviolet (EUV) lithography (λ = 13.5 nm). The irradiation system has an intensity monitor based on the Mo/Si multilayer beam splitter. This intensity monitor provides the irradiation energy onto sample surface. So it is possible to examine and confirm damage/ablation thresholds of EUV optical elements and doses for sensitivity of resist materials, which have the same specifications of those in the EUV lithography.", "subitem_description_type": "Abstract"}]}, "item_10005_description_6": {"attribute_name": "会議概要（会議名, 開催地, 会期, 主催者等）", "attribute_value_mlt": [{"subitem_description": "SPIE Photonics West LASE LAMOM ", "subitem_description_type": "Other"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "metadata only access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_14cb"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "石野, 雅彦"}], "nameIdentifiers": [{"nameIdentifier": "720820", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "タンフン, ヂン"}], "nameIdentifiers": [{"nameIdentifier": "720821", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "長谷川, 登"}], "nameIdentifiers": [{"nameIdentifier": "720822", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "坂上, 和之"}], "nameIdentifiers": [{"nameIdentifier": "720823", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "東口, 武史"}], "nameIdentifiers": [{"nameIdentifier": "720824", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "市丸, 智"}], "nameIdentifiers": [{"nameIdentifier": "720825", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "畑山, 雅俊"}], "nameIdentifiers": [{"nameIdentifier": "720826", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "鷲尾, 方一"}], "nameIdentifiers": [{"nameIdentifier": "720827", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "錦野, 将元"}], "nameIdentifiers": [{"nameIdentifier": "720828", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "石野 雅彦", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "720829", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "タンフン ヂン", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "720830", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "長谷川 登", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "720831", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "錦野 将元", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "720832", "nameIdentifierScheme": "WEKO"}]}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "eng"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "conference object", "resourceuri": "http://purl.org/coar/resource_type/c_c94f"}]}, "item_title": "Development of soft x-ray laser irradiation beamline for ablation and damage study", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "Development of soft x-ray laser irradiation beamline for ablation and damage study"}]}, "item_type_id": "10005", "owner": "1", "path": ["28"], "permalink_uri": "https://repo.qst.go.jp/records/73153", "pubdate": {"attribute_name": "公開日", "attribute_value": "2019-01-17"}, "publish_date": "2019-01-17", "publish_status": "0", "recid": "73153", "relation": {}, "relation_version_is_last": true, "title": ["Development of soft x-ray laser irradiation beamline for ablation and damage study"], "weko_shared_id": -1}