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  1. 学会発表・講演等
  2. ポスター発表

Development of soft x-ray laser irradiation beamline for ablation and damage study

https://repo.qst.go.jp/records/73153
https://repo.qst.go.jp/records/73153
dcf64ec8-7c90-4758-b9c0-0bc7a00fda66
Item type 会議発表用資料 / Presentation(1)
公開日 2019-01-17
タイトル
タイトル Development of soft x-ray laser irradiation beamline for ablation and damage study
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_c94f
資源タイプ conference object
アクセス権
アクセス権 metadata only access
アクセス権URI http://purl.org/coar/access_right/c_14cb
著者 石野, 雅彦

× 石野, 雅彦

WEKO 720820

石野, 雅彦

Search repository
タンフン, ヂン

× タンフン, ヂン

WEKO 720821

タンフン, ヂン

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長谷川, 登

× 長谷川, 登

WEKO 720822

長谷川, 登

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坂上, 和之

× 坂上, 和之

WEKO 720823

坂上, 和之

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東口, 武史

× 東口, 武史

WEKO 720824

東口, 武史

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市丸, 智

× 市丸, 智

WEKO 720825

市丸, 智

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畑山, 雅俊

× 畑山, 雅俊

WEKO 720826

畑山, 雅俊

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鷲尾, 方一

× 鷲尾, 方一

WEKO 720827

鷲尾, 方一

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錦野, 将元

× 錦野, 将元

WEKO 720828

錦野, 将元

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石野 雅彦

× 石野 雅彦

WEKO 720829

en 石野 雅彦

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タンフン ヂン

× タンフン ヂン

WEKO 720830

en タンフン ヂン

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長谷川 登

× 長谷川 登

WEKO 720831

en 長谷川 登

Search repository
錦野 将元

× 錦野 将元

WEKO 720832

en 錦野 将元

Search repository
抄録
内容記述タイプ Abstract
内容記述 In this presentation, we report on development of the soft x-ray laser (SXRL) irradiation system at QST. The SXRL has a wavelength of 13.9 nm, and this laser wavelength is close to the wavelength of extreme ultraviolet (EUV) lithography (λ = 13.5 nm). The irradiation system has an intensity monitor based on the Mo/Si multilayer beam splitter. This intensity monitor provides the irradiation energy onto sample surface. So it is possible to examine and confirm damage/ablation thresholds of EUV optical elements and doses for sensitivity of resist materials, which have the same specifications of those in the EUV lithography.
会議概要(会議名, 開催地, 会期, 主催者等)
内容記述タイプ Other
内容記述 SPIE Photonics West LASE LAMOM
発表年月日
日付 2019-02-05
日付タイプ Issued
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