{"created":"2023-05-15T14:53:43.057245+00:00","id":73153,"links":{},"metadata":{"_buckets":{"deposit":"29aac735-024e-45c4-aea9-ceacb5378b66"},"_deposit":{"created_by":1,"id":"73153","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"73153"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00073153","sets":["10:28"]},"author_link":["720826","720821","720827","720828","720829","720824","720830","720832","720823","720822","720820","720825","720831"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2019-02-05","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"In this presentation, we report on development of the soft x-ray laser (SXRL) irradiation system at QST. The SXRL has a wavelength of 13.9 nm, and this laser wavelength is close to the wavelength of extreme ultraviolet (EUV) lithography (λ = 13.5 nm). The irradiation system has an intensity monitor based on the Mo/Si multilayer beam splitter. This intensity monitor provides the irradiation energy onto sample surface. So it is possible to examine and confirm damage/ablation thresholds of EUV optical elements and doses for sensitivity of resist materials, which have the same specifications of those in the EUV lithography.","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"SPIE Photonics West LASE LAMOM ","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"石野, 雅彦"}],"nameIdentifiers":[{"nameIdentifier":"720820","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"タンフン, ヂン"}],"nameIdentifiers":[{"nameIdentifier":"720821","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長谷川, 登"}],"nameIdentifiers":[{"nameIdentifier":"720822","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"坂上, 和之"}],"nameIdentifiers":[{"nameIdentifier":"720823","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"東口, 武史"}],"nameIdentifiers":[{"nameIdentifier":"720824","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"市丸, 智"}],"nameIdentifiers":[{"nameIdentifier":"720825","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"畑山, 雅俊"}],"nameIdentifiers":[{"nameIdentifier":"720826","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"鷲尾, 方一"}],"nameIdentifiers":[{"nameIdentifier":"720827","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野, 将元"}],"nameIdentifiers":[{"nameIdentifier":"720828","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石野 雅彦","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"720829","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"タンフン ヂン","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"720830","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長谷川 登","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"720831","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野 将元","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"720832","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"Development of soft x-ray laser irradiation beamline for ablation and damage study","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Development of soft x-ray laser irradiation beamline for ablation and damage study"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2019-01-17"},"publish_date":"2019-01-17","publish_status":"0","recid":"73153","relation_version_is_last":true,"title":["Development of soft x-ray laser irradiation beamline for ablation and damage study"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:32:19.876721+00:00"}