{"_buckets": {"deposit": "ec392b33-2294-49b4-a702-334bf3915035"}, "_deposit": {"created_by": 1, "id": "73006", "owners": [1], "pid": {"revision_id": 0, "type": "depid", "value": "73006"}, "status": "published"}, "_oai": {"id": "oai:repo.qst.go.jp:00073006", "sets": ["28"]}, "author_link": ["719445", "719455", "719444", "719453", "719460", "719450", "719451", "719443", "719452", "719456", "719457", "719446", "719459", "719447", "719454", "719442", "719458", "719448", "719449"], "item_10005_date_7": {"attribute_name": "発表年月日", "attribute_value_mlt": [{"subitem_date_issued_datetime": "2018-11-07", "subitem_date_issued_type": "Issued"}]}, "item_10005_description_5": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "炭化ケイ素半導体(SiC)中の発光中心の一つであるシリコン空孔(VSi)[1]は、温度や磁場の高感度量子センサへの応用が期待されている[2,3]。本研究では、pnダイオード内の任意位置にプロトン(H+)ビーム描画[4]によりVSiを形成、H+照射量がその光学特性に与える影響を調べた。その結果、高照射量下(\u003e4×1013 H+/cm2)において結晶損傷による抵抗増大が特性劣化を引き起こすことがわかった。", "subitem_description_type": "Abstract"}]}, "item_10005_description_6": {"attribute_name": "会議概要（会議名, 開催地, 会期, 主催者等）", "attribute_value_mlt": [{"subitem_description": "先進パワー半導体分科会 第5回講演会", "subitem_description_type": "Other"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "metadata only access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_14cb"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "山崎, 雄一"}], "nameIdentifiers": [{"nameIdentifier": "719442", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "千葉, 陽史"}], "nameIdentifiers": [{"nameIdentifier": "719443", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "牧野, 高紘"}], "nameIdentifiers": [{"nameIdentifier": "719444", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "佐藤, 真一郎"}], "nameIdentifiers": [{"nameIdentifier": "719445", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "山田, 尚人"}], "nameIdentifiers": [{"nameIdentifier": "719446", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "佐藤, 隆博"}], "nameIdentifiers": [{"nameIdentifier": "719447", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "加田, 渉"}], "nameIdentifiers": [{"nameIdentifier": "719448", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "土方, 泰斗"}], "nameIdentifiers": [{"nameIdentifier": "719449", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "児島, 一聡"}], "nameIdentifiers": [{"nameIdentifier": "719450", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "-Y., Lee S."}], "nameIdentifiers": [{"nameIdentifier": "719451", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "大島, 武"}], "nameIdentifiers": [{"nameIdentifier": "719452", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "山崎 雄一", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "719453", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "千葉 陽史", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "719454", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "牧野 高紘", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "719455", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "佐藤 真一郎", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "719456", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "山田 尚人", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "719457", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "佐藤 隆博", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "719458", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "加田 渉", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "719459", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "大島 武", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "719460", "nameIdentifierScheme": "WEKO"}]}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "conference object", "resourceuri": "http://purl.org/coar/resource_type/c_c94f"}]}, "item_title": "プロトンビーム描画により形成したシリコン空孔の光学特性劣化要因に関する研究", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "プロトンビーム描画により形成したシリコン空孔の光学特性劣化要因に関する研究"}]}, "item_type_id": "10005", "owner": "1", "path": ["28"], "permalink_uri": "https://repo.qst.go.jp/records/73006", "pubdate": {"attribute_name": "公開日", "attribute_value": "2018-11-12"}, "publish_date": "2018-11-12", "publish_status": "0", "recid": "73006", "relation": {}, "relation_version_is_last": true, "title": ["プロトンビーム描画により形成したシリコン空孔の光学特性劣化要因に関する研究"], "weko_shared_id": -1}