{"created":"2023-05-15T14:53:36.577131+00:00","id":73006,"links":{},"metadata":{"_buckets":{"deposit":"ec392b33-2294-49b4-a702-334bf3915035"},"_deposit":{"created_by":1,"id":"73006","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"73006"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00073006","sets":["10:28"]},"author_link":["719445","719455","719444","719453","719460","719450","719451","719443","719452","719456","719457","719446","719459","719447","719454","719442","719458","719448","719449"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2018-11-07","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"炭化ケイ素半導体(SiC)中の発光中心の一つであるシリコン空孔(VSi)[1]は、温度や磁場の高感度量子センサへの応用が期待されている[2,3]。本研究では、pnダイオード内の任意位置にプロトン(H+)ビーム描画[4]によりVSiを形成、H+照射量がその光学特性に与える影響を調べた。その結果、高照射量下(>4×1013 H+/cm2)において結晶損傷による抵抗増大が特性劣化を引き起こすことがわかった。","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"先進パワー半導体分科会 第5回講演会","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"山崎, 雄一"}],"nameIdentifiers":[{"nameIdentifier":"719442","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"千葉, 陽史"}],"nameIdentifiers":[{"nameIdentifier":"719443","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"牧野, 高紘"}],"nameIdentifiers":[{"nameIdentifier":"719444","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐藤, 真一郎"}],"nameIdentifiers":[{"nameIdentifier":"719445","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山田, 尚人"}],"nameIdentifiers":[{"nameIdentifier":"719446","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐藤, 隆博"}],"nameIdentifiers":[{"nameIdentifier":"719447","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"加田, 渉"}],"nameIdentifiers":[{"nameIdentifier":"719448","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"土方, 泰斗"}],"nameIdentifiers":[{"nameIdentifier":"719449","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"児島, 一聡"}],"nameIdentifiers":[{"nameIdentifier":"719450","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"-Y., Lee S."}],"nameIdentifiers":[{"nameIdentifier":"719451","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"大島, 武"}],"nameIdentifiers":[{"nameIdentifier":"719452","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山崎 雄一","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"719453","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"千葉 陽史","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"719454","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"牧野 高紘","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"719455","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐藤 真一郎","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"719456","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"山田 尚人","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"719457","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"佐藤 隆博","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"719458","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"加田 渉","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"719459","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"大島 武","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"719460","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"プロトンビーム描画により形成したシリコン空孔の光学特性劣化要因に関する研究","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"プロトンビーム描画により形成したシリコン空孔の光学特性劣化要因に関する研究"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-11-12"},"publish_date":"2018-11-12","publish_status":"0","recid":"73006","relation_version_is_last":true,"title":["プロトンビーム描画により形成したシリコン空孔の光学特性劣化要因に関する研究"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:33:46.562521+00:00"}