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Damage on EUV multilayer optics caused by irradiation of focused pico-second soft x-ray laser pulses
https://repo.qst.go.jp/records/71940
https://repo.qst.go.jp/records/71940ae40691e-c71e-4621-bd0c-54704bb75521
| Item type | 会議発表用資料 / Presentation(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2016-06-15 | |||||
| タイトル | ||||||
| タイトル | Damage on EUV multilayer optics caused by irradiation of focused pico-second soft x-ray laser pulses | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_c94f | |||||
| 資源タイプ | conference object | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
石野, 雅彦
× 石野, 雅彦× 市丸, 智× 錦野, 将元× 長谷川, 登× 畑山, 雅俊× 河内, 哲哉× 奥, 哲× 石野 雅彦× 錦野 将元× 長谷川 登× 河内 哲哉 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | To study the damage mechanism of EUV multilayers, we have performed irradiation experiments of SXRL pulses having a wavelength of 13.9 nm and duration of 7 ps onto multilayers. By varying the irradiation fluence, the damage threshold could be estimated quantitatively. The estimated damage threshold of the EUV multilayer varies with the film material. However, the threshold did not depend on number of multilayer periods. We can conclude that the damage threshold is a parameter related to the film material only. | |||||
| 会議概要（会議名, 開催地, 会期, 主催者等） | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | XOPT(X線光学素子、検出器光源とその応用に関する国際会議) | |||||
| 発表年月日 | ||||||
| 日付 | 2016-05-20 | |||||
| 日付タイプ | Issued | |||||
