{"created":"2023-05-15T14:52:41.470427+00:00","id":71940,"links":{},"metadata":{"_buckets":{"deposit":"f1e4abb1-e62e-423b-bd1a-64cae6d939be"},"_deposit":{"created_by":1,"id":"71940","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"71940"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00071940","sets":["10:28"]},"author_link":["708583","708575","708580","708574","708573","708578","708576","708581","708582","708579","708577"],"item_10005_date_7":{"attribute_name":"発表年月日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2016-05-20","subitem_date_issued_type":"Issued"}]},"item_10005_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"To study the damage mechanism of EUV multilayers, we have performed irradiation experiments of SXRL pulses having a wavelength of 13.9 nm and duration of 7 ps onto multilayers.  By varying the irradiation fluence, the damage threshold could be estimated quantitatively. The estimated damage threshold of the EUV multilayer varies with the film material. However, the threshold did not depend on number of multilayer periods. We can conclude that the damage threshold is a parameter related to the film material only.","subitem_description_type":"Abstract"}]},"item_10005_description_6":{"attribute_name":"会議概要（会議名, 開催地, 会期, 主催者等）","attribute_value_mlt":[{"subitem_description":"XOPT(X線光学素子、検出器光源とその応用に関する国際会議)","subitem_description_type":"Other"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"石野, 雅彦"}],"nameIdentifiers":[{"nameIdentifier":"708573","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"市丸, 智"}],"nameIdentifiers":[{"nameIdentifier":"708574","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野, 将元"}],"nameIdentifiers":[{"nameIdentifier":"708575","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長谷川, 登"}],"nameIdentifiers":[{"nameIdentifier":"708576","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"畑山, 雅俊"}],"nameIdentifiers":[{"nameIdentifier":"708577","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"河内, 哲哉"}],"nameIdentifiers":[{"nameIdentifier":"708578","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"奥, 哲"}],"nameIdentifiers":[{"nameIdentifier":"708579","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石野 雅彦","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"708580","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野 将元","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"708581","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長谷川 登","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"708582","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"河内 哲哉","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"708583","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"conference object","resourceuri":"http://purl.org/coar/resource_type/c_c94f"}]},"item_title":"Damage on EUV multilayer optics caused by irradiation of focused pico-second soft x-ray laser pulses","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Damage on EUV multilayer optics caused by irradiation of focused pico-second soft x-ray laser pulses"}]},"item_type_id":"10005","owner":"1","path":["28"],"pubdate":{"attribute_name":"公開日","attribute_value":"2016-06-15"},"publish_date":"2016-06-15","publish_status":"0","recid":"71940","relation_version_is_last":true,"title":["Damage on EUV multilayer optics caused by irradiation of focused pico-second soft x-ray laser pulses"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T19:45:37.924444+00:00"}