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Deep-hole drilling of amorphous silica glass by extreme ultraviolet femtosecond pulses
https://repo.qst.go.jp/records/49510
https://repo.qst.go.jp/records/495100c907ab8-6925-4024-8b68-6713db3c69ce
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2019-01-28 | |||||
| タイトル | ||||||
| タイトル | Deep-hole drilling of amorphous silica glass by extreme ultraviolet femtosecond pulses | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Shibuya, Tatsunori
× Shibuya, Tatsunori× Takahashi, Takashi× Sakaue, Kazuyuki× タンフン, ヂン× Hara, Hiroyuki× Higashiguchi, Takeshi× 石野, 雅彦× Koshiba, Yuya× 錦野, 将元× Ogawa, Hiroshi× Tanaka, Masahito× Washio, Masakazu× Kobayashi, Yohei× Kuroda, Ryunosuke× タンフン ヂン× 石野 雅彦× 錦野 将元 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A free-electron laser (FEL) is a robust tool for studying the interaction of intense X-ray with matter. In this study, we investigate the damage threshold and morphology of fused silica irradiated by extreme ultraviolet femtosecond pulses of FEL. The experimental results indicate the superiority of the FEL processing. The FEL-damage threshold of fused silica at a wavelength of 13.5 nm is 0.171 J/cm2, which is 20 times lower than that of a near infrared (NIR) femtosecond laser. The relationship between the crater depth and laser fluence reveals that the effective absorption length is αeff-1 = 58 nm. The damage threshold and the absorption length are the key values for smooth crater formation. In addition, the formation of rim structures and microcracks, which are usually are the critical issues in NIR laser processing, cannot be found in the interaction region. The hole diameter is maintained below the beam size at the exit. | |||||
| 書誌情報 |
APPLIED PHYSICS LETTERS 号 113, p. 171902, 発行日 2018-10 |
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| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1063/1.5046125 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://aip.scitation.org/doi/10.1063/1.5046125 | |||||
| 関連名称 | https://aip.scitation.org/doi/10.1063/1.5046125 | |||||
