{"created":"2023-05-15T14:38:21.690319+00:00","id":49510,"links":{},"metadata":{"_buckets":{"deposit":"259642e5-f61e-4668-a595-83f07b84d000"},"_deposit":{"created_by":1,"id":"49510","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"49510"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00049510","sets":["1"]},"author_link":["500057","500052","500041","500045","500043","500051","500054","500046","500042","500047","500050","500044","500049","500053","500056","500055","500048"],"item_8_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2018-10","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"113","bibliographicPageStart":"171902","bibliographic_titles":[{"bibliographic_title":"APPLIED PHYSICS LETTERS"}]}]},"item_8_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"A free-electron laser (FEL) is a robust tool for studying the interaction of intense X-ray with matter. In this study, we investigate the damage threshold and morphology of fused silica irradiated by extreme ultraviolet femtosecond pulses of FEL. The experimental results indicate the superiority of the FEL processing. The FEL-damage threshold of fused silica at a wavelength of 13.5 nm is 0.171 J/cm2, which is 20 times lower than that of a near infrared (NIR) femtosecond laser. The relationship between the crater depth and laser fluence reveals that the effective absorption length is αeff-1 = 58 nm. The damage threshold and the absorption length are the key values for smooth crater formation. In addition, the formation of rim structures and microcracks, which are usually are the critical issues in NIR laser processing, cannot be found in the interaction region. The hole diameter is maintained below the beam size at the exit.","subitem_description_type":"Abstract"}]},"item_8_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"10.1063/1.5046125","subitem_relation_type_select":"DOI"}}]},"item_8_relation_17":{"attribute_name":"関連サイト","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"https://aip.scitation.org/doi/10.1063/1.5046125"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"https://aip.scitation.org/doi/10.1063/1.5046125","subitem_relation_type_select":"URI"}}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Shibuya, Tatsunori"}],"nameIdentifiers":[{"nameIdentifier":"500041","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Takahashi, Takashi"}],"nameIdentifiers":[{"nameIdentifier":"500042","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Sakaue, Kazuyuki"}],"nameIdentifiers":[{"nameIdentifier":"500043","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"タンフン, ヂン"}],"nameIdentifiers":[{"nameIdentifier":"500044","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Hara, Hiroyuki"}],"nameIdentifiers":[{"nameIdentifier":"500045","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Higashiguchi, Takeshi"}],"nameIdentifiers":[{"nameIdentifier":"500046","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石野, 雅彦"}],"nameIdentifiers":[{"nameIdentifier":"500047","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Koshiba, Yuya"}],"nameIdentifiers":[{"nameIdentifier":"500048","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野, 将元"}],"nameIdentifiers":[{"nameIdentifier":"500049","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Ogawa, Hiroshi"}],"nameIdentifiers":[{"nameIdentifier":"500050","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Tanaka, Masahito"}],"nameIdentifiers":[{"nameIdentifier":"500051","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Washio, Masakazu"}],"nameIdentifiers":[{"nameIdentifier":"500052","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Kobayashi, Yohei"}],"nameIdentifiers":[{"nameIdentifier":"500053","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Kuroda, Ryunosuke"}],"nameIdentifiers":[{"nameIdentifier":"500054","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"タンフン ヂン","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"500055","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石野 雅彦","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"500056","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野 将元","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"500057","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Deep-hole drilling of amorphous silica glass by extreme ultraviolet femtosecond pulses","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Deep-hole drilling of amorphous silica glass by extreme ultraviolet femtosecond pulses"}]},"item_type_id":"8","owner":"1","path":["1"],"pubdate":{"attribute_name":"公開日","attribute_value":"2019-01-28"},"publish_date":"2019-01-28","publish_status":"0","recid":"49510","relation_version_is_last":true,"title":["Deep-hole drilling of amorphous silica glass by extreme ultraviolet femtosecond pulses"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T23:19:24.826113+00:00"}