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Irradiation damage test of Mo/Si, Ru/Si and Nb/Si multilayers using the soft x-ray laser built at QST
https://repo.qst.go.jp/records/48932
https://repo.qst.go.jp/records/48932e7dc1ba6-4cee-4968-b8f3-ea62089d3d53
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2018-05-08 | |||||
| タイトル | ||||||
| タイトル | Irradiation damage test of Mo/Si, Ru/Si and Nb/Si multilayers using the soft x-ray laser built at QST | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Ichimaru, Satoshi
× Ichimaru, Satoshi× 石野, 雅彦× 錦野, 将元× Hatayama, Masatoshi× 長谷川, 登× 河内, 哲哉× Maruyama, Takashi× Inokuma, Kazuhito× Zenba, Mika× Oku, Satoshi× 石野 雅彦× 錦野 将元× 長谷川 登× 河内 哲哉 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The irradiation damage for Mo/Si, Ru/Si, and Nb/Si multilayers are investigated using the soft X-ray laser system at QST. Scanning electronic microscopy observations reveal that the size of the damage on the Nb/Si multilayer is smaller than the other multilayers. This suggests that the damage fluence by the EUV irradiation of the Nb/Si multilayers is greater than the other multilayers. | |||||
| 書誌情報 |
Proceeding of The 15th International Conference on X-Ray Lasers 巻 202, p. 303-307, 発行日 2018-05 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0930-8989 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1007/978-3-319-73025-7_45 | |||||
