@article{oai:repo.qst.go.jp:00048932,
 author = {Ichimaru, Satoshi and 石野, 雅彦 and 錦野, 将元 and Hatayama, Masatoshi and 長谷川, 登 and 河内, 哲哉 and Maruyama, Takashi and Inokuma, Kazuhito and Zenba, Mika and Oku, Satoshi and 石野 雅彦 and 錦野 将元 and 長谷川 登 and 河内 哲哉},
 journal = {Proceeding of The 15th International Conference on X-Ray Lasers},
 month = {May},
 note = {The irradiation damage for Mo/Si, Ru/Si, and Nb/Si multilayers are investigated using the soft X-ray laser system at QST. Scanning electronic microscopy observations reveal that the size of the damage on the Nb/Si multilayer is smaller than the other multilayers. This suggests that the damage fluence by the EUV irradiation of the Nb/Si multilayers is greater than the other multilayers.},
 pages = {303--307},
 title = {Irradiation damage test of Mo/Si, Ru/Si and Nb/Si multilayers using the soft x-ray laser built at QST},
 volume = {202},
 year = {2018}
}