{"created":"2023-05-15T14:37:56.002709+00:00","id":48932,"links":{},"metadata":{"_buckets":{"deposit":"39f50734-86e1-4604-b8f8-792f0b661e37"},"_deposit":{"created_by":1,"id":"48932","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"48932"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00048932","sets":["1"]},"author_link":["493018","493014","493024","493019","493021","493022","493025","493026","493015","493020","493027","493016","493023","493017"],"item_8_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2018-05","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"307","bibliographicPageStart":"303","bibliographicVolumeNumber":"202","bibliographic_titles":[{"bibliographic_title":"Proceeding of The 15th International Conference on X-Ray Lasers"}]}]},"item_8_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The irradiation damage for Mo/Si, Ru/Si, and Nb/Si multilayers are investigated using the soft X-ray laser system at QST. Scanning electronic microscopy observations reveal that the size of the damage on the Nb/Si multilayer is smaller than the other multilayers. This suggests that the damage fluence by the EUV irradiation of the Nb/Si multilayers is greater than the other multilayers.","subitem_description_type":"Abstract"}]},"item_8_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"10.1007/978-3-319-73025-7_45","subitem_relation_type_select":"DOI"}}]},"item_8_source_id_9":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"0930-8989","subitem_source_identifier_type":"ISSN"}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Ichimaru, Satoshi"}],"nameIdentifiers":[{"nameIdentifier":"493014","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石野, 雅彦"}],"nameIdentifiers":[{"nameIdentifier":"493015","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野, 将元"}],"nameIdentifiers":[{"nameIdentifier":"493016","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Hatayama, Masatoshi"}],"nameIdentifiers":[{"nameIdentifier":"493017","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長谷川, 登"}],"nameIdentifiers":[{"nameIdentifier":"493018","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"河内, 哲哉"}],"nameIdentifiers":[{"nameIdentifier":"493019","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Maruyama, Takashi"}],"nameIdentifiers":[{"nameIdentifier":"493020","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Inokuma, Kazuhito"}],"nameIdentifiers":[{"nameIdentifier":"493021","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Zenba, Mika"}],"nameIdentifiers":[{"nameIdentifier":"493022","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Oku, Satoshi"}],"nameIdentifiers":[{"nameIdentifier":"493023","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石野 雅彦","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"493024","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"錦野 将元","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"493025","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"長谷川 登","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"493026","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"河内 哲哉","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"493027","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Irradiation damage test of Mo/Si, Ru/Si and Nb/Si multilayers using the soft x-ray laser built at QST","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Irradiation damage test of Mo/Si, Ru/Si and Nb/Si multilayers using the soft x-ray laser built at QST"}]},"item_type_id":"8","owner":"1","path":["1"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-05-08"},"publish_date":"2018-05-08","publish_status":"0","recid":"48932","relation_version_is_last":true,"title":["Irradiation damage test of Mo/Si, Ru/Si and Nb/Si multilayers using the soft x-ray laser built at QST"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T23:22:44.875754+00:00"}