WEKO3
アイテム
Beam diameter reduction by optimization of an extraction condition in a compact ion microbeam system
https://repo.qst.go.jp/records/48699
https://repo.qst.go.jp/records/48699049f5686-b245-4ad8-bdb1-671dfd5dc99a
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2018-04-12 | |||||
| タイトル | ||||||
| タイトル | Beam diameter reduction by optimization of an extraction condition in a compact ion microbeam system | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
大久保, 猛
× 大久保, 猛× 石井, 保行× 大久保 猛× 石井 保行 |
|||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A several hundred keV class compact proton microbeam system was developed as a prototype of a 1 MeV compact microbeam system to be used in micro-fabrication and micro-analyses. Optimization of an extraction condition was performed to increase demagnification and to achieve a beam diameter of approximately 1 μm. The beam diameter measurement showed that a diameter of 1.8 μm was obtained. This indicates that the compact microbeam system is a feasible alternative to a MeV class conventional large accelerator system. | |||||
| 書誌情報 |
Physics Procedia 巻 90, p. 79-84, 発行日 2017-10 |
|||||
| 出版者 | ||||||
| 出版者 | Elsevier | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 1875-3892 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1016/j.phpro.2017.09.022 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://www.sciencedirect.com/science/article/pii/S1875389217301815?via%3Dihub | |||||
| 関連名称 | http://www.sciencedirect.com/science/article/pii/S1875389217301815?via%3Dihub | |||||
