@article{oai:repo.qst.go.jp:00048699,
 author = {大久保, 猛 and 石井, 保行 and 大久保 猛 and 石井 保行},
 journal = {Physics Procedia},
 month = {Oct},
 note = {A several hundred keV class compact proton microbeam system was developed as a prototype of a 1 MeV compact microbeam system to be used in micro-fabrication and micro-analyses. Optimization of an extraction condition was performed to increase demagnification and to achieve a beam diameter of approximately 1 μm. The beam diameter measurement showed that a diameter of 1.8 μm was obtained. This indicates that the compact microbeam system is a feasible alternative to a MeV class conventional large accelerator system.},
 pages = {79--84},
 title = {Beam diameter reduction by optimization of an extraction condition in a compact ion microbeam system},
 volume = {90},
 year = {2017}
}