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Membrane-supported LSI with integrated heater and temperature monitor for on-site annealing-recovery from 20 kGy gamma ray irradiation damage
https://repo.qst.go.jp/records/86359
https://repo.qst.go.jp/records/8635919b6cf88-c562-42b8-900b-57364b8ccab0
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2022-06-17 | |||||
| タイトル | ||||||
| タイトル | Membrane-supported LSI with integrated heater and temperature monitor for on-site annealing-recovery from 20 kGy gamma ray irradiation damage | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Gong, Tianjiao
× Gong, Tianjiao× Suzuki, Yukio× Akinori, Takeyama× Takeshi, Ohshima× Tanaka, Shuji× Akinori, Takeyama× Takeshi, Ohshima |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | In this study, we proposed a novel membrane-supported large-scale integration (LSI) with integrated heater and temperature monitor for on-site annealing-recovery from TID (total ionizing dose) effect with low energy consumption, aiming at solving the problem of integrated circuit (IC) damage by gamma ray irradiation. The heater and membrane structure were fabricated around an LSI by using MEMS (micro electromechanical systems) technology. The thermal characteristics of the microheater was studied for temperature monitoring to ensure an appropriate recovery temperature. 20 kGy gamma-ray irradiation was performed on the LSI samples and then the irradiated samples were annealed for recovery by the integrated microheater. It was found that the driving current of the LSI decreased after irradiation and almost recovered to the original level after 15-minutes annealing at 300°C. We report, for the first time, the successful recovery of the LSI from 20 kGy gamma-ray TID damage by using the integrated heater and temperature monitor. | |||||
| 書誌情報 |
Sensors and Actuators: A. Physical 巻 343, p. 113677-1-113677-7, 発行日 2022-06 |
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| 出版者 | ||||||
| 出版者 | Elsevier | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1016/j.sna.2022.113677 | |||||
