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Improvement of soft magnetic properties and in-plane uniaxial magnetic anisotropy in FeCoAlO films fabricated by asymmetric targets
https://repo.qst.go.jp/records/85742
https://repo.qst.go.jp/records/85742031e5d38-9136-4f94-9c51-5805b8360046
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2022-03-25 | |||||
| タイトル | ||||||
| タイトル | Improvement of soft magnetic properties and in-plane uniaxial magnetic anisotropy in FeCoAlO films fabricated by asymmetric targets | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Zheng, Fu
× Zheng, Fu× Han, Zeyu× Songtian, Li× Ma, Zhi× Gao, Hua× Songtian, Li |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Soft magnetic FeCoAlO thin films were prepared by asymmetric targets, and their magnetic properties and high-frequency characteristics were studied. The coercivity Hc of the films initially decreased with increasing the number of Al2O3 chips on the Fe70Co30 target. Then, the minimum value of the coercivity was observed for the film prepared with 12 Al2O3 chips (Hc||= 6.3 Oe and Hc⊥ = 1.9 Oe, Hk = 110 Oe), and as more Al2O3 chips were added, the coercivity increased. The good soft magnetic properties of the films mainly came from the refinement of grain size. The films also had excellent high-frequency response, i.e., fr = 3.4 GHz, and the real part of the permeability μ′ at low frequency had a large value of approximately 200 for the film prepared with 12 Al2O3 chips. For 16 Al2O3 chips, the film had fr = 3.7 GHz and μ′ ~ 150 when f < 3.0 GHz. The analysis of film composition demonstrated that there was a composition gradient in the FeCoAlO films fabricated by asymmetric targets, which resulted in additional stress-induced anisotropy that produced greater in-plane uniaxial magnetic anisotropy. These kinds of thin films showed promise for applications in microwave magnetic film devices. | |||||
| 書誌情報 |
Applied Physics A 巻 128, 号 253, 発行日 2022-02 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0947-8396 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1007/s00339-022-05403-5 | |||||
| 関連サイト | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1007/s00339-022-05403-5 | |||||
