@article{oai:repo.qst.go.jp:00085742,
 author = {Zheng, Fu and Han, Zeyu and Songtian, Li and Ma, Zhi and Gao, Hua and Songtian, Li},
 issue = {253},
 journal = {Applied Physics A},
 month = {Feb},
 note = {Soft magnetic FeCoAlO thin films were prepared by asymmetric targets, and their magnetic properties and high-frequency characteristics were studied. The coercivity Hc of the films initially decreased with increasing the number of Al2O3 chips on the Fe70Co30 target. Then, the minimum value of the coercivity was observed for the film prepared with 12 Al2O3 chips (Hc||= 6.3 Oe and Hc⊥ = 1.9 Oe, Hk = 110 Oe), and as more Al2O3 chips were added, the coercivity increased. The good soft magnetic properties of the films mainly came from the refinement of grain size. The films also had excellent high-frequency response, i.e., fr = 3.4 GHz, and the real part of the permeability μ′ at low frequency had a large value of approximately 200 for the film prepared with 12 Al2O3 chips. For 16 Al2O3 chips, the film had fr = 3.7 GHz and μ′ ~ 150 when f < 3.0 GHz. The analysis of film composition demonstrated that there was a composition gradient in the FeCoAlO films fabricated by asymmetric targets, which resulted in additional stress-induced anisotropy that produced greater in-plane uniaxial magnetic anisotropy. These kinds of thin films showed promise for applications in microwave magnetic film devices.},
 title = {Improvement of soft magnetic properties and in-plane uniaxial magnetic anisotropy in FeCoAlO films fabricated by asymmetric targets},
 volume = {128},
 year = {2022}
}