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Independent contribution of optical attenuation length in ultrafast laser-induced structural change
https://repo.qst.go.jp/records/84241
https://repo.qst.go.jp/records/8424134f7e17f-7c03-4a17-a8ae-79a0bdb25d91
Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2021-08-25 | |||||
タイトル | ||||||
タイトル | Independent contribution of optical attenuation length in ultrafast laser-induced structural change | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
Tatsunori, Shibuya
× Tatsunori, Shibuya× Kazuyuki, Sakaue× Hiroshi, Ogawa× Daisuke, Satoh× Dinh, Thanhhung× Masahiko, Ishino× Masahito, Tanaka× Masakazu, Washio× Takeshi, Higashiguchi× Masaharu, Nishikino× Akira, Kon× Yuya, Kubota× Yuichi, Inubushi× Shigeki, Owada× Yohei, Kobayashi× Ryunosuke, Kuroda× Dinh, Thanhhung× Masahiko, Ishino× Masaharu, Nishikino× Akira, Kon |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Although laser irradiation with femtosecond pulses is known to generate crystallization and morphological changes, the contribution of optical parameters to material changes is still in discussion. Here, we compare two structures irradiated near Si–L2,3 edges by an extreme ultraviolet femtosecond pulse. Our result implies that, despite the femtosecond irradiation regime, these values of the optical attenuation length between the wavelengths of 10.3-nm and 13.5-nm differ by one order of magnitude. From the structural comparison, the original crystalline state was maintained upon irradiation at 13.5-nm, on the other hand, transition to an amorphous state occurred at 10.3-nm. The difference in optical attenuation length directly influence to the decision of material crystallization or morphological changes, even if the irradiation condition is under the femtosecond regime and same pulse duration. Our result reveals the contribution of optical attenuation length in ultrafast laser-induced structural change. | |||||
書誌情報 |
Optics Express 巻 29, 号 21, p. 33121-33133, 発行日 2021-09 |
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出版者 | ||||||
出版者 | OSA Publishing | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1094-4087 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1364/OE.432130 | |||||
関連サイト | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-29-21-33121 |