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  1. 原著論文

Independent contribution of optical attenuation length in ultrafast laser-induced structural change

https://repo.qst.go.jp/records/84241
https://repo.qst.go.jp/records/84241
34f7e17f-7c03-4a17-a8ae-79a0bdb25d91
Item type 学術雑誌論文 / Journal Article(1)
公開日 2021-08-25
タイトル
タイトル Independent contribution of optical attenuation length in ultrafast laser-induced structural change
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
アクセス権
アクセス権 metadata only access
アクセス権URI http://purl.org/coar/access_right/c_14cb
著者 Tatsunori, Shibuya

× Tatsunori, Shibuya

WEKO 1017621

Tatsunori, Shibuya

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Kazuyuki, Sakaue

× Kazuyuki, Sakaue

WEKO 1017622

Kazuyuki, Sakaue

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Hiroshi, Ogawa

× Hiroshi, Ogawa

WEKO 1017623

Hiroshi, Ogawa

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Daisuke, Satoh

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WEKO 1017624

Daisuke, Satoh

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Dinh, Thanhhung

× Dinh, Thanhhung

WEKO 1017625

Dinh, Thanhhung

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Masahiko, Ishino

× Masahiko, Ishino

WEKO 1017626

Masahiko, Ishino

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Masahito, Tanaka

× Masahito, Tanaka

WEKO 1017627

Masahito, Tanaka

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Masakazu, Washio

× Masakazu, Washio

WEKO 1017628

Masakazu, Washio

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Takeshi, Higashiguchi

× Takeshi, Higashiguchi

WEKO 1017629

Takeshi, Higashiguchi

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Masaharu, Nishikino

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WEKO 1017630

Masaharu, Nishikino

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Akira, Kon

× Akira, Kon

WEKO 1017631

Akira, Kon

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Yuya, Kubota

× Yuya, Kubota

WEKO 1017632

Yuya, Kubota

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Yuichi, Inubushi

× Yuichi, Inubushi

WEKO 1017633

Yuichi, Inubushi

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Shigeki, Owada

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WEKO 1017634

Shigeki, Owada

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Yohei, Kobayashi

× Yohei, Kobayashi

WEKO 1017635

Yohei, Kobayashi

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Ryunosuke, Kuroda

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WEKO 1017636

Ryunosuke, Kuroda

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Dinh, Thanhhung

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WEKO 1017637

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Masahiko, Ishino

× Masahiko, Ishino

WEKO 1017638

en Masahiko, Ishino

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Masaharu, Nishikino

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WEKO 1017639

en Masaharu, Nishikino

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Akira, Kon

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WEKO 1017640

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内容記述タイプ Abstract
内容記述 Although laser irradiation with femtosecond pulses is known to generate crystallization and morphological changes, the contribution of optical parameters to material changes is still in discussion. Here, we compare two structures irradiated near Si–L2,3 edges by an extreme ultraviolet femtosecond pulse. Our result implies that, despite the femtosecond irradiation regime, these values of the optical attenuation length between the wavelengths of 10.3-nm and 13.5-nm differ by one order of magnitude. From the structural comparison, the original crystalline state was maintained upon irradiation at 13.5-nm, on the other hand, transition to an amorphous state occurred at 10.3-nm. The difference in optical attenuation length directly influence to the decision of material crystallization or morphological changes, even if the irradiation condition is under the femtosecond regime and same pulse duration. Our result reveals the contribution of optical attenuation length in ultrafast laser-induced structural change.
書誌情報 Optics Express

巻 29, 号 21, p. 33121-33133, 発行日 2021-09
出版者
出版者 OSA Publishing
ISSN
収録物識別子タイプ ISSN
収録物識別子 1094-4087
DOI
識別子タイプ DOI
関連識別子 10.1364/OE.432130
関連サイト
識別子タイプ URI
関連識別子 https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-29-21-33121
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