@article{oai:repo.qst.go.jp:00084241,
 author = {Tatsunori, Shibuya and Kazuyuki, Sakaue and Hiroshi, Ogawa and Daisuke, Satoh and Dinh, Thanhhung and Masahiko, Ishino and Masahito, Tanaka and Masakazu, Washio and Takeshi, Higashiguchi and Masaharu, Nishikino and Akira, Kon and Yuya, Kubota and Yuichi, Inubushi and Shigeki, Owada and Yohei, Kobayashi and Ryunosuke, Kuroda and Dinh, Thanhhung and Masahiko, Ishino and Masaharu, Nishikino and Akira, Kon},
 issue = {21},
 journal = {Optics Express},
 month = {Sep},
 note = {Although laser irradiation with femtosecond pulses is known to generate crystallization and morphological changes, the contribution of optical parameters to material changes is still in discussion. Here, we compare two structures irradiated near Si–L2,3 edges by an extreme ultraviolet femtosecond pulse. Our result implies that, despite the femtosecond irradiation regime, these values of the optical attenuation length between the wavelengths of 10.3-nm and 13.5-nm differ by one order of magnitude. From the structural comparison, the original crystalline state was maintained upon irradiation at 13.5-nm, on the other hand, transition to an amorphous state occurred at 10.3-nm. The difference in optical attenuation length directly influence to the decision of material crystallization or morphological changes, even if the irradiation condition is under the femtosecond regime and same pulse duration. Our result reveals the contribution of optical attenuation length in ultrafast laser-induced structural change.},
 pages = {33121--33133},
 title = {Independent contribution of optical attenuation length in ultrafast laser-induced structural change},
 volume = {29},
 year = {2021}
}