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Calibration of Mo/Si Multilayer Beam-splitter for Soft X-Ray Laser Beamline
https://repo.qst.go.jp/records/83101
https://repo.qst.go.jp/records/83101c7be1a77-0cb2-4976-84b7-6f3eb72338e0
| Item type | 一般雑誌記事 / Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2021-06-28 | |||||
| タイトル | ||||||
| タイトル | Calibration of Mo/Si Multilayer Beam-splitter for Soft X-Ray Laser Beamline | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Masahiko, Ishino
× Masahiko, Ishino× Dinh, Thanhhung× Noboru, Hasegawa× Masaharu, Nishikino× Kazuyuki, Sakaue× Takeshi, Higashiguchi× Tasashi, Hatano× Masahiko, Ishino× Dinh, Thanhhung× Noboru, Hasegawa× Masaharu, Nishikino |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We have developed the soft x-ray laser irradiation beamline for surface processing and damage studies. The beamline is equipped with an intensity monitor, which provides the laser intensity directed onto the sample surface. To derive the irradiation energy from the energy acquired by the intensity monitor, we have evaluated the characteristic features of the Mo/Si multilayer beam-splitter, and then estimated the relationship between the irradiation and detection energies. The maximum fluence is high enough to create ablation (damage) structures on materials. | |||||
| 書誌情報 |
Photon Factory Activity Report 2020 巻 38, p. 106-1-106-4, 発行日 2021-07 |
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| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://pfwww.kek.jp/acr/2020pdf/u_reports.html#IT | |||||
