@article{oai:repo.qst.go.jp:00083101,
 author = {Masahiko, Ishino and Dinh, Thanhhung and Noboru, Hasegawa and Masaharu, Nishikino and Kazuyuki, Sakaue and Takeshi, Higashiguchi and Tasashi, Hatano and Masahiko, Ishino and Dinh, Thanhhung and Noboru, Hasegawa and Masaharu, Nishikino},
 journal = {Photon Factory Activity Report 2020},
 month = {Jul},
 note = {We have developed the soft x-ray laser irradiation beamline for surface processing and damage studies. The beamline is equipped with an intensity monitor, which provides the laser intensity directed onto the sample surface. To derive the irradiation energy from the energy acquired by the intensity monitor, we have evaluated the characteristic features of the Mo/Si multilayer beam-splitter, and then estimated the relationship between the irradiation and detection energies. The maximum fluence is high enough to create ablation (damage) structures on materials.},
 pages = {106-1--106-4},
 title = {Calibration of Mo/Si Multilayer Beam-splitter for Soft X-Ray Laser Beamline},
 volume = {38},
 year = {2021}
}