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Preliminary Study: Measurement of Ion Beam Energy Spreads Produced by a Penning Ionization Gauge-Type Ion Source Using Electromagnets for a Mega-electron Volt Compact Ion Microbeam System
https://repo.qst.go.jp/records/79981
https://repo.qst.go.jp/records/79981baf94ca1-c081-44dc-a92d-c2560680d175
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2020-03-09 | |||||
| タイトル | ||||||
| タイトル | Preliminary Study: Measurement of Ion Beam Energy Spreads Produced by a Penning Ionization Gauge-Type Ion Source Using Electromagnets for a Mega-electron Volt Compact Ion Microbeam System | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Ishii, Yasuyuki
× Ishii, Yasuyuki× Okubo, Takeru× Kashiwagi, Hirotsugu× Yoshinobu, Miyake(Beam Seiko Inc.)× Ishii, Yasuyuki× Okubo, Takeru× Kashiwagi, Hirotsugu |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The energy spreads of ion beams generated from a penning ionization gauge-type ion source with electromagnets were measured using a parallel electrostatic analyzer. The ion source was developed to be installed in a mega-electron volt (MeV) compact ion microbeam system.A gaseous ion beam of expectedly high brightness and narrow energy spread was generated from the ion source to form a microbeam. To produce such an ion beam, a high-density plasma with a small volume was generated using a strong magnetic field in the ion source. The beam energy spread width was of particular importance because it forms an ion microbeam by reducing the chromatic aberration at a focusing lens.In this report, the energy spread was investigated by changing the parameters of the ion source, e.g., extraction voltage, excitation current of electromagnets, vacuum, and anode voltage. The investigation showed that spread widths are influenced by the extraction voltage, vacuum,and anode voltage. The minimum width of∼5.0±0.1 eV was obtained at a beam energy of 200 eV. This value is acceptable for the MeV compact ion microbeam system. | |||||
| 書誌情報 |
Review of Scientific Instruments 巻 91, 号 4, p. 043304-1-043304-5, 発行日 2020-05 |
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| 出版者 | ||||||
| 出版者 | The American Institute of Physics | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0034-6748 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1063/1.5132301 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://aip.scitation.org/doi/10.1063/1.5132301?af=R&feed=most-recent | |||||
