@article{oai:repo.qst.go.jp:00079981,
 author = {Ishii, Yasuyuki and Okubo, Takeru and Kashiwagi, Hirotsugu and Yoshinobu, Miyake(Beam Seiko Inc.) and Ishii, Yasuyuki and Okubo, Takeru and Kashiwagi, Hirotsugu},
 issue = {4},
 journal = {Review of Scientific Instruments},
 month = {May},
 note = {The energy spreads of ion beams generated from a penning ionization gauge-type ion source with electromagnets were measured using a parallel electrostatic analyzer. The ion source was developed to be installed in a mega-electron volt (MeV) compact ion microbeam system.A gaseous ion beam of expectedly high brightness and narrow energy spread was generated from the ion source to form a microbeam. To produce such an ion beam, a high-density plasma with a small volume was generated using a strong magnetic field in the ion source. The beam energy spread width was of particular importance because it forms an ion microbeam by reducing the chromatic aberration at a focusing lens.In this report, the energy spread was investigated by changing the parameters of the ion source, e.g., extraction voltage, excitation current of electromagnets, vacuum, and anode voltage. The investigation showed that spread widths are influenced by the extraction voltage, vacuum,and anode voltage. The minimum width of∼5.0±0.1 eV was obtained at a beam energy of 200 eV. This value is acceptable for the MeV compact ion microbeam system.},
 pages = {043304-1--043304-5},
 title = {Preliminary Study: Measurement of Ion Beam Energy Spreads Produced by a Penning Ionization Gauge-Type Ion Source Using Electromagnets for a Mega-electron Volt Compact Ion Microbeam System},
 volume = {91},
 year = {2020}
}