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  1. 原著論文

Soft x-ray laser beamline for surface processing and damage studies

https://repo.qst.go.jp/records/79899
https://repo.qst.go.jp/records/79899
77418817-c86f-4045-a800-9780ad385d59
Item type 学術雑誌論文 / Journal Article(1)
公開日 2020-04-17
タイトル
タイトル Soft x-ray laser beamline for surface processing and damage studies
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
アクセス権
アクセス権 metadata only access
アクセス権URI http://purl.org/coar/access_right/c_14cb
著者 Ishino, Masahiko

× Ishino, Masahiko

WEKO 866511

Ishino, Masahiko

Search repository
Dinh, Thanhhung

× Dinh, Thanhhung

WEKO 866512

Dinh, Thanhhung

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Hosaka, Yuji

× Hosaka, Yuji

WEKO 866513

Hosaka, Yuji

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Hasegawa, Noboru

× Hasegawa, Noboru

WEKO 866514

Hasegawa, Noboru

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Yoshimura, Kimio

× Yoshimura, Kimio

WEKO 866515

Yoshimura, Kimio

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Yamamoto, Hiroki

× Yamamoto, Hiroki

WEKO 866516

Yamamoto, Hiroki

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Hatano, Tadashi

× Hatano, Tadashi

WEKO 866517

Hatano, Tadashi

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Higashiguchi, Takeshi

× Higashiguchi, Takeshi

WEKO 866518

Higashiguchi, Takeshi

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Sakaue, Kazuyuki

× Sakaue, Kazuyuki

WEKO 866519

Sakaue, Kazuyuki

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Ichimaru, Satoshi

× Ichimaru, Satoshi

WEKO 866520

Ichimaru, Satoshi

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Hatayama, Masatoshi

× Hatayama, Masatoshi

WEKO 866521

Hatayama, Masatoshi

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Sasaki, Akira

× Sasaki, Akira

WEKO 866522

Sasaki, Akira

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Washio, Masakazu

× Washio, Masakazu

WEKO 866523

Washio, Masakazu

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Nishikino, Masaharu

× Nishikino, Masaharu

WEKO 866524

Nishikino, Masaharu

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Maekawa, Yasunari

× Maekawa, Yasunari

WEKO 866525

Maekawa, Yasunari

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Ishino, Masahiko

× Ishino, Masahiko

WEKO 866526

en Ishino, Masahiko

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Dinh, Thanhhung

× Dinh, Thanhhung

WEKO 866527

en Dinh, Thanhhung

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Hosaka, Yuji

× Hosaka, Yuji

WEKO 866528

en Hosaka, Yuji

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Hasegawa, Noboru

× Hasegawa, Noboru

WEKO 866529

en Hasegawa, Noboru

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Yoshimura, Kimio

× Yoshimura, Kimio

WEKO 866530

en Yoshimura, Kimio

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Yamamoto, Hiroki

× Yamamoto, Hiroki

WEKO 866531

en Yamamoto, Hiroki

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Sasaki, Akira

× Sasaki, Akira

WEKO 866532

en Sasaki, Akira

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Nishikino, Masaharu

× Nishikino, Masaharu

WEKO 866533

en Nishikino, Masaharu

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Maekawa, Yasunari

× Maekawa, Yasunari

WEKO 866534

en Maekawa, Yasunari

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抄録
内容記述タイプ Abstract
内容記述 We have developed a soft x-ray laser (SXRL) beamline equipped with an intensity monitor dedicated to the ablation study such as surface processing and damage formation. To get the correct irradiation energy/fluence, an intensity monitor composed of a Mo/Si multilayer beam splitter and an x-ray charge-coupled device camera has been installed in the beamline. Mo/Si multilayer beam splitter has a large polarization dependence in the reflectivity around the incident angle of 45 deg. However, by evaluating the relationship between reflectivity and transmittance of the beam splitter appropriately, the irradiation energy onto the sample surface can be derived from the energy acquired by the intensity monitor. This SXRL beamline is available to not only the ablation phenomena but also the performance evaluation of soft x-ray optics and resists.
書誌情報 Applied Optics

巻 59, 号 12, p. 3692-3698, 発行日 2020-04
ISSN
収録物識別子タイプ ISSN
収録物識別子 1559-128X
DOI
識別子タイプ DOI
関連識別子 10.1364/AO.387792
関連サイト
識別子タイプ URI
関連識別子 https://www.osapublishing.org/ao/abstract.cfm?uri=ao-59-12-3692
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