@article{oai:repo.qst.go.jp:00079899,
 author = {Ishino, Masahiko and Dinh, Thanhhung and Hosaka, Yuji and Hasegawa, Noboru and Yoshimura, Kimio and Yamamoto, Hiroki and Hatano, Tadashi and Higashiguchi, Takeshi and Sakaue, Kazuyuki and Ichimaru, Satoshi and Hatayama, Masatoshi and Sasaki, Akira and Washio, Masakazu and Nishikino, Masaharu and Maekawa, Yasunari and Ishino, Masahiko and Dinh, Thanhhung and Hosaka, Yuji and Hasegawa, Noboru and Yoshimura, Kimio and Yamamoto, Hiroki and Sasaki, Akira and Nishikino, Masaharu and Maekawa, Yasunari},
 issue = {12},
 journal = {Applied Optics},
 month = {Apr},
 note = {We have developed a soft x-ray laser (SXRL) beamline equipped with an intensity monitor dedicated to the ablation study such as surface processing and damage formation. To get the correct irradiation energy/fluence, an intensity monitor composed of a Mo/Si multilayer beam splitter and an x-ray charge-coupled device camera has been installed in the beamline. Mo/Si multilayer beam splitter has a large polarization dependence in the reflectivity around the incident angle of 45 deg. However, by evaluating the relationship between reflectivity and transmittance of the beam splitter appropriately, the irradiation energy onto the sample surface can be derived from the energy acquired by the intensity monitor. This SXRL beamline is available to not only the ablation phenomena but also the performance evaluation of soft x-ray optics and resists.},
 pages = {3692--3698},
 title = {Soft x-ray laser beamline for surface processing and damage studies},
 volume = {59},
 year = {2020}
}