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Self-supporting tetrahedral amorphous carbon films consisting of multilayered structure prepared using filtered arc deposition
https://repo.qst.go.jp/records/77371
https://repo.qst.go.jp/records/77371312bafb3-14bb-4bb9-9c79-7ca5c802263f
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2019-11-10 | |||||
| タイトル | ||||||
| タイトル | Self-supporting tetrahedral amorphous carbon films consisting of multilayered structure prepared using filtered arc deposition | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Toru, HARIGAI
× Toru, HARIGAI× Yu, MIYAMOTO× Masafumi, YAMANO× Tsuyoshi, TANIMOTO× Yoshiyuki, SUDA× Hirofumi, TAKIKAWA× Takeshi, KAWANO× Nishiuchi, Mamiko× Sakaki, Hironao× Kondo, Kiminori× Satoru, KANEKO× Shinsuke, KUNITSUGU× Mamiko, Nishiuchi× Hironao, Sakaki× Kiminori, Kondo |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Self-supporting 110-nm-thick tetrahedral amorphous carbon (ta-C) films with a multilayered structure were fabricated as a carbon film target for the laser-driven ion acceleration. The self-supporting ta-C films consisted of three layers with the thicknesses of 35 nm, 40 nm, and 35 nm thick, and the film density of 3.0 g/cm3, 2.7 g/cm3, and 3.0 g/cm3, respectively. The multilayered ta-C film was fabricated using the T-shape filtered arc deposition method on a Si substrate coated water-soluble material. Silk fibroin and dextran were used as the water-soluble material. The water-soluble material formed between a ta-C film and a Si substrate was dissolved, and then, the ta-C film released from the substrate. Thick single-layer ta-C films partially peeled off on the water-soluble material and broke during the dissolving process. Self-supporting ta-C films were obtained by scooping the released ta-C film on a perforated substrate. The laser was irradiated on the self-supporting ta-C films, and the ta-C film with a higher film thickness and/or film density showed a higher laser irradiation tolerance. | |||||
| 書誌情報 |
Thin Solid Films 巻 675, p. 123-127, 発行日 2019-04 |
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| 出版者 | ||||||
| 出版者 | Elsevier | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0040-6090 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1016/j.tsf.2019.02.022 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.sciencedirect.com/science/article/pii/S0040609019301002 | |||||
