@article{oai:repo.qst.go.jp:00077371,
 author = {Toru, HARIGAI and Yu, MIYAMOTO and Masafumi, YAMANO and Tsuyoshi, TANIMOTO and Yoshiyuki, SUDA and Hirofumi, TAKIKAWA and Takeshi, KAWANO and Nishiuchi, Mamiko and Sakaki, Hironao and Kondo, Kiminori and Satoru, KANEKO and Shinsuke, KUNITSUGU and Mamiko, Nishiuchi and Hironao, Sakaki and Kiminori, Kondo},
 journal = {Thin Solid Films},
 month = {Apr},
 note = {Self-supporting 110-nm-thick tetrahedral amorphous carbon (ta-C) films with a multilayered structure were fabricated as a carbon film target for the laser-driven ion acceleration. The self-supporting ta-C films consisted of three layers with the thicknesses of 35 nm, 40 nm, and 35 nm thick, and the film density of 3.0 g/cm3, 2.7 g/cm3, and 3.0 g/cm3, respectively. The multilayered ta-C film was fabricated using the T-shape filtered arc deposition method on a Si substrate coated water-soluble material. Silk fibroin and dextran were used as the water-soluble material. The water-soluble material formed between a ta-C film and a Si substrate was dissolved, and then, the ta-C film released from the substrate. Thick single-layer ta-C films partially peeled off on the water-soluble material and broke during the dissolving process. Self-supporting ta-C films were obtained by scooping the released ta-C film on a perforated substrate. The laser was irradiated on the self-supporting ta-C films, and the ta-C film with a higher film thickness and/or film density showed a higher laser irradiation tolerance.},
 pages = {123--127},
 title = {Self-supporting tetrahedral amorphous carbon films consisting of multilayered structure prepared using filtered arc deposition},
 volume = {675},
 year = {2019}
}