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Short pulse soft x-ray laser ablation at low fluence region

https://repo.qst.go.jp/records/75555
https://repo.qst.go.jp/records/75555
08f124bc-a500-4d4a-a2d1-0c4ef175c74c
Item type 会議発表用資料 / Presentation(1)
公開日 2019-04-08
タイトル
タイトル Short pulse soft x-ray laser ablation at low fluence region
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_c94f
資源タイプ conference object
アクセス権
アクセス権 metadata only access
アクセス権URI http://purl.org/coar/access_right/c_14cb
著者 石野, 雅彦

× 石野, 雅彦

WEKO 742323

石野, 雅彦

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タンフン, ヂン

× タンフン, ヂン

WEKO 742324

タンフン, ヂン

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北村, 俊幸

× 北村, 俊幸

WEKO 742325

北村, 俊幸

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長谷川, 登

× 長谷川, 登

WEKO 742326

長谷川, 登

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錦野, 将元

× 錦野, 将元

WEKO 742327

錦野, 将元

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坂上, 和之

× 坂上, 和之

WEKO 742328

坂上, 和之

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澁谷, 達則

× 澁谷, 達則

WEKO 742329

澁谷, 達則

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市丸, 智

× 市丸, 智

WEKO 742330

市丸, 智

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畑山, 雅俊

× 畑山, 雅俊

WEKO 742331

畑山, 雅俊

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東口, 武史

× 東口, 武史

WEKO 742332

東口, 武史

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鷲尾, 方一

× 鷲尾, 方一

WEKO 742333

鷲尾, 方一

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木下, 博雄

× 木下, 博雄

WEKO 742334

木下, 博雄

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末元, 徹

× 末元, 徹

WEKO 742335

末元, 徹

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A. Pikuz, Tatiana

× A. Pikuz, Tatiana

WEKO 742336

A. Pikuz, Tatiana

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Ishino, Masahiko

× Ishino, Masahiko

WEKO 742337

en Ishino, Masahiko

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Dinh, Thanhhung

× Dinh, Thanhhung

WEKO 742338

en Dinh, Thanhhung

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Kitamura, Toshiyuki

× Kitamura, Toshiyuki

WEKO 742339

en Kitamura, Toshiyuki

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Hasegawa, Noboru

× Hasegawa, Noboru

WEKO 742340

en Hasegawa, Noboru

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Nishikino, Masaharu

× Nishikino, Masaharu

WEKO 742341

en Nishikino, Masaharu

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抄録
内容記述タイプ Abstract
内容記述 We report the systematic experimental study of the surface modifications resulting by interactions of both femtosecond and picosecond soft x-ray laser pulses with matters. When the femtosecond free electron soft x-ray laser pulse irradiated onto the LiF crystal, the surface modification structures appeared by the fluence of around 10 mJ/cm2. This value was in good accord with the value obtained by the picosecond soft x-ray laser pulse. The ablation process occurring on LiF crystals can be explained by the spallation model. The driving force of the spallation is an increasing inertial pressure appearing inside of the irradiated heating layer. The damage structures on Al formed by the picosecond and femtosecond soft x-ray laser pulses were the almost the same, and ablation thresholds were also the same. However, these ablation threshold values were smaller than the model calculation. The threshold of Al surface, also of the Au surface, was near the melting threshold, and the modification depths agreed with melting depths. In the low fluence ablation regime, it is considered that the first change of the surface structure is the melting of the surface and is probably due to splash of the molten layer.
会議概要(会議名, 開催地, 会期, 主催者等)
内容記述タイプ Other
内容記述 SPIE. Optics + Optoelectronics
発表年月日
日付 2019-04-01
日付タイプ Issued
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