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Short pulse soft x-ray laser ablation at low fluence region
https://repo.qst.go.jp/records/75555
https://repo.qst.go.jp/records/7555508f124bc-a500-4d4a-a2d1-0c4ef175c74c
| Item type | 会議発表用資料 / Presentation(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2019-04-08 | |||||
| タイトル | ||||||
| タイトル | Short pulse soft x-ray laser ablation at low fluence region | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_c94f | |||||
| 資源タイプ | conference object | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
石野, 雅彦
× 石野, 雅彦× タンフン, ヂン× 北村, 俊幸× 長谷川, 登× 錦野, 将元× 坂上, 和之× 澁谷, 達則× 市丸, 智× 畑山, 雅俊× 東口, 武史× 鷲尾, 方一× 木下, 博雄× 末元, 徹× A. Pikuz, Tatiana× Ishino, Masahiko× Dinh, Thanhhung× Kitamura, Toshiyuki× Hasegawa, Noboru× Nishikino, Masaharu |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We report the systematic experimental study of the surface modifications resulting by interactions of both femtosecond and picosecond soft x-ray laser pulses with matters. When the femtosecond free electron soft x-ray laser pulse irradiated onto the LiF crystal, the surface modification structures appeared by the fluence of around 10 mJ/cm2. This value was in good accord with the value obtained by the picosecond soft x-ray laser pulse. The ablation process occurring on LiF crystals can be explained by the spallation model. The driving force of the spallation is an increasing inertial pressure appearing inside of the irradiated heating layer. The damage structures on Al formed by the picosecond and femtosecond soft x-ray laser pulses were the almost the same, and ablation thresholds were also the same. However, these ablation threshold values were smaller than the model calculation. The threshold of Al surface, also of the Au surface, was near the melting threshold, and the modification depths agreed with melting depths. In the low fluence ablation regime, it is considered that the first change of the surface structure is the melting of the surface and is probably due to splash of the molten layer. | |||||
| 会議概要（会議名, 開催地, 会期, 主催者等） | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | SPIE. Optics + Optoelectronics | |||||
| 発表年月日 | ||||||
| 日付 | 2019-04-01 | |||||
| 日付タイプ | Issued | |||||
