@misc{oai:repo.qst.go.jp:00075555, author = {石野, 雅彦 and タンフン, ヂン and 北村, 俊幸 and 長谷川, 登 and 錦野, 将元 and 坂上, 和之 and 澁谷, 達則 and 市丸, 智 and 畑山, 雅俊 and 東口, 武史 and 鷲尾, 方一 and 木下, 博雄 and 末元, 徹 and A. Pikuz, Tatiana and Ishino, Masahiko and Dinh, Thanhhung and Kitamura, Toshiyuki and Hasegawa, Noboru and Nishikino, Masaharu}, month = {Apr}, note = {We report the systematic experimental study of the surface modifications resulting by interactions of both femtosecond and picosecond soft x-ray laser pulses with matters. When the femtosecond free electron soft x-ray laser pulse irradiated onto the LiF crystal, the surface modification structures appeared by the fluence of around 10 mJ/cm2. This value was in good accord with the value obtained by the picosecond soft x-ray laser pulse. The ablation process occurring on LiF crystals can be explained by the spallation model. The driving force of the spallation is an increasing inertial pressure appearing inside of the irradiated heating layer. The damage structures on Al formed by the picosecond and femtosecond soft x-ray laser pulses were the almost the same, and ablation thresholds were also the same. However, these ablation threshold values were smaller than the model calculation. The threshold of Al surface, also of the Au surface, was near the melting threshold, and the modification depths agreed with melting depths. In the low fluence ablation regime, it is considered that the first change of the surface structure is the melting of the surface and is probably due to splash of the molten layer., SPIE. Optics + Optoelectronics}, title = {Short pulse soft x-ray laser ablation at low fluence region}, year = {2019} }