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Ru mirror based EUV attenuator with continuous and wide dynamic range
https://repo.qst.go.jp/records/72901
https://repo.qst.go.jp/records/729015db4c4cb-ce43-43aa-90f2-978b9bdfdb57
| Item type | 会議発表用資料 / Presentation(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2018-08-23 | |||||
| タイトル | ||||||
| タイトル | Ru mirror based EUV attenuator with continuous and wide dynamic range | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_c94f | |||||
| 資源タイプ | conference object | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Hatayama, Masatoshi
× Hatayama, Masatoshi× Ichimaru, Satoshi× 石野, 雅彦× 錦野, 将元× Oku, Satoshi× 石野 雅彦× 錦野 将元 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We designed and demonstrated an EUV attenuator which has wide dynamic range, easy alignment, and continuous attenuation. A pair of Ru mirror mounted on the rotate and linear stages attenuates input EUV energies by only changing each incident angle. In principle, the component is expected to keep the output beam direction and spatiotemporal beam quality. In addition, damage threshold of this new attenuator is expected to be higher than that of conventional thin film filters. Measured reflectivity of our Ru mirror at 13.5 nm has a good agreement with calculated value. The results show that a pair of this mirror will attenuate for dynamic range around 1 to 0.01 corresponding to incident angle of 0 degree to 30 degrees. | |||||
| 会議概要（会議名, 開催地, 会期, 主催者等） | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | International Conference on Synchrotron Radiation Instrumentation (SRI2018) | |||||
| 発表年月日 | ||||||
| 日付 | 2018-06-11 | |||||
| 日付タイプ | Issued | |||||
