@misc{oai:repo.qst.go.jp:00072901,
 author = {Hatayama, Masatoshi and Ichimaru, Satoshi and 石野, 雅彦 and 錦野, 将元 and Oku, Satoshi and 石野 雅彦 and 錦野 将元},
 month = {Jun},
 note = {We designed and demonstrated an EUV attenuator which has wide dynamic range, easy alignment, and continuous attenuation. A pair of Ru mirror mounted on the rotate and linear stages attenuates input EUV energies by only changing each incident angle. In principle, the component is expected to keep the output beam direction and spatiotemporal beam quality. In addition, damage threshold of this new attenuator is expected to be higher than that of conventional thin film filters. Measured reflectivity of our Ru mirror at 13.5 nm  has a good agreement with calculated value. The results show that a pair of this mirror will attenuate for dynamic range around 1 to 0.01 corresponding to incident angle of 0 degree to 30 degrees., International Conference on Synchrotron Radiation Instrumentation (SRI2018)},
 title = {Ru mirror based EUV attenuator with continuous and wide dynamic range},
 year = {2018}
}