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Chemical States Analysis of Trace-boron by using an Improved SEM-SXES
https://repo.qst.go.jp/records/54782
https://repo.qst.go.jp/records/5478233ccdc34-fcec-486c-aa87-9ad1763b820c
| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-07-04 | |||||
| タイトル | ||||||
| タイトル | Chemical States Analysis of Trace-boron by using an Improved SEM-SXES | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
| 資源タイプ | conference paper | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Terauchi, Masami
× Terauchi, Masami× Takahashi, Hideyuki× Takakura, Masaru× Murano, Takanori× Koike, Masato× Imazono, Takashi× Nagano, Tetsuya× Sasai, Hiroyuki× Koeda, Masaru× 小池 雅人× 今園 孝志 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | A soft X-ray emission spectroscopy-based electron microscopy, SXES-SEM, instrument used in combination with a micro-channel plate (MCP) detector and CMOS camera has been applied for analyzing the electronic state of bulk specimens. To improve the energy resolution of the system, the MCP with a channel pitch of 15 m has changed to a new one with that of 7.5 m. The L2,3 emission spectrum of Al from a bulk specimen was obtained by the improved system in photon counting mode. Taking into account of thermal broadening of the Fermi distribution function, we found that the energy resolution was improved up to 0.08 eV from 0.13 eV. Photon counting mode giving high energy resolution needs a longer acquisition time than analog integration mode. Thus, analog integration mode with a good signal to noise ratio but a few times lower energy resolution than photon counting mode was used to perform trace-boron analysis. | |||||
| 書誌情報 |
Microscopy & Microanalysis 巻 22, 号 S3, p. 414-415, 発行日 2016-07 |
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| 出版者 | ||||||
| 出版者 | Microscopy Society of America | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1017/S1431927616002920 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.cambridge.org/core/journals/microscopy-and-microanalysis/article/div-classtitlechemical-states-analysis-of-trace-boron-by-using-an-improved-sem-sxesdiv/221CF44082F0879C6823F47870DB42C6 | |||||
| 関連名称 | https://www.cambridge.org/core/journals/microscopy-and-microanalysis/article/div-classtitlechemical-states-analysis-of-trace-boron-by-using-an-improved-sem-sxesdiv/221CF44082F0879C6823F47870DB42C6 | |||||
