@inproceedings{oai:repo.qst.go.jp:00054782,
 author = {Terauchi, Masami and Takahashi, Hideyuki and Takakura, Masaru and Murano, Takanori and Koike, Masato and Imazono, Takashi and Nagano, Tetsuya and Sasai, Hiroyuki and Koeda, Masaru and 小池 雅人 and 今園 孝志},
 book = {Microscopy & Microanalysis},
 issue = {S3},
 month = {Jul},
 note = {A soft X-ray emission spectroscopy-based electron microscopy, SXES-SEM, instrument used in combination with a micro-channel plate (MCP) detector and CMOS camera has been applied for analyzing the electronic state of bulk specimens. To improve the energy resolution of the system, the MCP with a channel pitch of 15 m has changed to a new one with that of 7.5 m. The L2,3 emission spectrum of Al from a bulk specimen was obtained by the improved system in photon counting mode. Taking into account of thermal broadening of the Fermi distribution function, we found that the energy resolution was improved up to 0.08 eV from 0.13 eV. Photon counting mode giving high energy resolution needs a longer acquisition time than analog integration mode. Thus, analog integration mode with a good signal to noise ratio but a few times lower energy resolution than photon counting mode was used to perform trace-boron analysis.},
 pages = {414--415},
 publisher = {Microscopy Society of America},
 title = {Chemical States Analysis of Trace-boron by using an Improved SEM-SXES},
 volume = {22},
 year = {2016}
}