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Experimental evaluation of a method to enhance the diffraction efficiency by overcoating diamond-like carbon (DLC) on soft X-ray laminar-type gratings
https://repo.qst.go.jp/records/54780
https://repo.qst.go.jp/records/5478087e417d3-f49b-444f-86c7-7e832cd126af
| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-07-04 | |||||
| タイトル | ||||||
| タイトル | Experimental evaluation of a method to enhance the diffraction efficiency by overcoating diamond-like carbon (DLC) on soft X-ray laminar-type gratings | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
| 資源タイプ | conference paper | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
今園, 孝志
× 今園, 孝志× 小池, 雅人× 長野哲也× 笹井浩行× 大上裕紀× 倉本智史× 寺内正己× 高橋秀之× 能登谷智史× 村野孝訓× M., Gullikson Eric× 今園 孝志× 小池 雅人 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Efficiently detecting the B-K emission band around 6.76 nm from a trace concentration of boron in steel compounds has motivated a theoretical exploration of means of increasing the diffraction efficiency of a laminar grating with carbon overcoating. To experimentally evaluate this enhancement, a Ni grating was coated with a high-density carbon film, i.e., diamond-like carbon (DLC). The first order diffraction efficiencies of the Ni gratings coated with and without DLC were measured to be 25.8 % and 16.9 %, respectively, at a wavelength of 6.76 nm and an angle of incidence of 87.07°. The ratio of diffraction efficiency obtained experimentally vs. that calculated by numerical simulation is 0.87 for the DLC-coated Ni grating. The diffraction efficiency of a Ni grating coated with a low-density carbon film, amorphous carbon (a-C), was also slightly improved to be 19.6 %. Furthermore, a distinct minimum of the zeroth order lights of the two carbon-coated Ni gratings were observed at around 6.76 nm, which is coincident with the maximum of the first order light. | |||||
| 書誌情報 |
AIP Conference Proceedings 巻 1741, 号 1, p. 040043-1-040043-4, 発行日 2016-07 |
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| 出版者 | ||||||
| 出版者 | AIP Publishing | |||||
| ISBN | ||||||
| 識別子タイプ | ISBN | |||||
| 関連識別子 | 978-0-7354-1398-6 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1063/1.4952915 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | http://aip.scitation.org/doi/abs/10.1063/1.4952915 | |||||
| 関連名称 | http://aip.scitation.org/doi/abs/10.1063/1.4952915 | |||||
