@inproceedings{oai:repo.qst.go.jp:00054780,
 author = {今園, 孝志 and 小池, 雅人 and 長野哲也 and 笹井浩行 and 大上裕紀 and 倉本智史 and 寺内正己 and 高橋秀之 and 能登谷智史 and 村野孝訓 and M., Gullikson Eric and 今園 孝志 and 小池 雅人},
 book = {AIP Conference Proceedings},
 issue = {1},
 month = {Jul},
 note = {Efficiently detecting the B-K emission band around 6.76 nm from a trace concentration of boron in steel compounds has motivated a theoretical exploration of means of increasing the diffraction efficiency of a laminar grating with carbon overcoating. To experimentally evaluate this enhancement, a Ni grating was coated with a high-density carbon film, i.e., diamond-like carbon (DLC). The first order diffraction efficiencies of the Ni gratings coated with and without DLC were measured to be 25.8 % and 16.9 %, respectively, at a wavelength of 6.76 nm and an angle of incidence of 87.07°. The ratio of diffraction efficiency obtained experimentally vs. that calculated by numerical simulation is 0.87 for the DLC-coated Ni grating. The diffraction efficiency of a Ni grating coated with a low-density carbon film, amorphous carbon (a-C), was also slightly improved to be 19.6 %. Furthermore, a distinct minimum of the zeroth order lights of the two carbon-coated Ni gratings were observed at around 6.76 nm, which is coincident with the maximum of the first order light.},
 pages = {040043-1--040043-4},
 publisher = {AIP Publishing},
 title = {Experimental evaluation of a method to enhance the diffraction efficiency by overcoating diamond-like carbon (DLC) on soft X-ray laminar-type gratings},
 volume = {1741},
 year = {2016}
}