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Enhancement of diffraction efficiency of laminar-type diffraction gratings overcoated with diamond-like carbon (DLC) in soft x-ray region
https://repo.qst.go.jp/records/54773
https://repo.qst.go.jp/records/54773546de436-8336-4223-8501-448bc4b89a1c
| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-07-04 | |||||
| タイトル | ||||||
| タイトル | Enhancement of diffraction efficiency of laminar-type diffraction gratings overcoated with diamond-like carbon (DLC) in soft x-ray region | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
| 資源タイプ | conference paper | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Koike, Masato
× Koike, Masato× Imazono, Takashi× Nagano, Tetsuya× Sasai, Hiroyuki× Oue, Yuki× Yonezawa, Zeno× Kuramoto, Satoshi× Terauchi, Masami× Takahashi, Hideyuki× Notoya, Satoshi× Murano, Takanori× 小池 雅人× 今園 孝志 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Born is the critical trace element due to take the advantage of improving quenching characteristics in steel. Recently there is a great demand to detect the B-K emission band at around 6.76 nm more efficiently. To meet this demand we performed a feasibility study to enhance the diffraction efficiency of laminar-type diffraction grating based on a newly discovered physical phenomenon in the region of total reflection. The phenomenon is embodied as a transparent high-density material layer overcoated on a metal layer on grating grooves. The material should have intermediate diffractive index of vacuum and the metal layer. We found that high density diamond-like carbon (DLC) having a density of 3.1 g/cm3 is one of the best material and simulated the diffraction efficiency in a spectral region of 3.5-8.5 nm. The optimum thickness is 24 nm for an incidence angle of 87.0. Then the first order diffraction efficiency is expected to achieve up to 29.7 %, which is improved from 15.6 % for Ni or 14.1 % for Au, at 6.76 nm | |||||
| 書誌情報 |
AIP Conference Proceedings 巻 1741, 号 1, p. 040045-1-040045-4, 発行日 2016-07 |
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| 出版者 | ||||||
| 出版者 | AIP Publishing | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1063/1.4952917 | |||||
| 関連サイト | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | http://dx.doi.org/10.1063/1.4952917 | |||||
| 関連名称 | http://dx.doi.org/10.1063/1.4952917 | |||||
