@inproceedings{oai:repo.qst.go.jp:00054773, author = {Koike, Masato and Imazono, Takashi and Nagano, Tetsuya and Sasai, Hiroyuki and Oue, Yuki and Yonezawa, Zeno and Kuramoto, Satoshi and Terauchi, Masami and Takahashi, Hideyuki and Notoya, Satoshi and Murano, Takanori and 小池 雅人 and 今園 孝志}, book = {AIP Conference Proceedings}, issue = {1}, month = {Jul}, note = {Born is the critical trace element due to take the advantage of improving quenching characteristics in steel. Recently there is a great demand to detect the B-K emission band at around 6.76 nm more efficiently. To meet this demand we performed a feasibility study to enhance the diffraction efficiency of laminar-type diffraction grating based on a newly discovered physical phenomenon in the region of total reflection. The phenomenon is embodied as a transparent high-density material layer overcoated on a metal layer on grating grooves. The material should have intermediate diffractive index of vacuum and the metal layer. We found that high density diamond-like carbon (DLC) having a density of 3.1 g/cm3 is one of the best material and simulated the diffraction efficiency in a spectral region of 3.5-8.5 nm. The optimum thickness is 24 nm for an incidence angle of 87.0. Then the first order diffraction efficiency is expected to achieve up to 29.7 %, which is improved from 15.6 % for Ni or 14.1 % for Au, at 6.76 nm}, pages = {040045-1--040045-4}, publisher = {AIP Publishing}, title = {Enhancement of diffraction efficiency of laminar-type diffraction gratings overcoated with diamond-like carbon (DLC) in soft x-ray region}, volume = {1741}, year = {2016} }