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Micro-structuring of epoxy resists containing nanoparticles by proton beam writing
https://repo.qst.go.jp/records/48074
https://repo.qst.go.jp/records/48074d1633699-bed2-494a-824f-34dce0200e7a
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-07-04 | |||||
| タイトル | ||||||
| タイトル | Micro-structuring of epoxy resists containing nanoparticles by proton beam writing | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
佐野, 遼
× 佐野, 遼× 早川, 志文× 林, 英臣× 石井, 保行× 西川, 宏之× 石井 保行 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Proton beam writing (PBW) on SU-8 composites with nanoparticles (size: 14–750 nm) of silver, silica, alumina, and carbon with concentration of 5.0 wt% was studied aiming for high-aspect-ratio microstructuring. Results of SRIM simulation suggest that deep micromachining of more than 100 lm is possible by 3.0 MeV PBW with increase in lateral straggling of less than 5.0%. Sensitivity loss of 150% was observed by introduction of 5.0 wt% nanoparticles to SU-8. There is a correlation between the sensitivity loss and volume concentration of nanoparticles. We fabricated pillar arrays of SU-8/silver nanocomposites with 10 lm in diameter and 80 lm in height by PBW at 3.0 MeV. Cross-sectional observation of the SU-8/silver pillar arrays shows that silver nanoparticles are homogeneously dispersed in SU-8, while aggregation was observed at the side surface. |
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| 書誌情報 |
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 巻 404, p. 228-232, 発行日 2017-06 |
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| 出版者 | ||||||
| 出版者 | Elsevier Scientific Publishers | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1016/j.nimb.2017.01.068 | |||||
| 関連サイト | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | http://dx.doi.org/10.1016/j.nimb.2017.01.068 | |||||
| 関連名称 | http://dx.doi.org/10.1016/j.nimb.2017.01.068 | |||||
