{"created":"2023-05-15T14:37:17.136499+00:00","id":48074,"links":{},"metadata":{"_buckets":{"deposit":"edeae2d7-018b-4ab6-a9a6-3fa8e2d04dab"},"_deposit":{"created_by":1,"id":"48074","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"48074"},"status":"published"},"_oai":{"id":"oai:repo.qst.go.jp:00048074","sets":["1"]},"author_link":["482711","482707","482710","482708","482706","482709"],"item_8_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2017-06","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"232","bibliographicPageStart":"228","bibliographicVolumeNumber":"404","bibliographic_titles":[{"bibliographic_title":"Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms"}]}]},"item_8_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Proton beam writing (PBW) on SU-8 composites with nanoparticles (size: 14–750 nm) of silver, silica,\nalumina, and carbon with concentration of 5.0 wt% was studied aiming for high-aspect-ratio microstructuring.\nResults of SRIM simulation suggest that deep micromachining of more than 100 lm is possible\nby 3.0 MeV PBW with increase in lateral straggling of less than 5.0%. Sensitivity loss of 150% was\nobserved by introduction of 5.0 wt% nanoparticles to SU-8. There is a correlation between the sensitivity\nloss and volume concentration of nanoparticles. We fabricated pillar arrays of SU-8/silver nanocomposites\nwith 10 lm in diameter and 80 lm in height by PBW at 3.0 MeV. Cross-sectional observation of the\nSU-8/silver pillar arrays shows that silver nanoparticles are homogeneously dispersed in SU-8, while\naggregation was observed at the side surface.","subitem_description_type":"Abstract"}]},"item_8_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Elsevier Scientific Publishers"}]},"item_8_relation_14":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"10.1016/j.nimb.2017.01.068","subitem_relation_type_select":"DOI"}}]},"item_8_relation_17":{"attribute_name":"関連サイト","attribute_value_mlt":[{"subitem_relation_name":[{"subitem_relation_name_text":"http://dx.doi.org/10.1016/j.nimb.2017.01.068"}],"subitem_relation_type_id":{"subitem_relation_type_id_text":"http://dx.doi.org/10.1016/j.nimb.2017.01.068","subitem_relation_type_select":"DOI"}}]},"item_access_right":{"attribute_name":"アクセス権","attribute_value_mlt":[{"subitem_access_right":"metadata only access","subitem_access_right_uri":"http://purl.org/coar/access_right/c_14cb"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"佐野, 遼"}],"nameIdentifiers":[{"nameIdentifier":"482706","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"早川, 志文"}],"nameIdentifiers":[{"nameIdentifier":"482707","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"林, 英臣"}],"nameIdentifiers":[{"nameIdentifier":"482708","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石井, 保行"}],"nameIdentifiers":[{"nameIdentifier":"482709","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"西川, 宏之"}],"nameIdentifiers":[{"nameIdentifier":"482710","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"石井 保行","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"482711","nameIdentifierScheme":"WEKO"}]}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Micro-structuring of epoxy resists containing nanoparticles by proton beam writing","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Micro-structuring of epoxy resists containing nanoparticles by proton beam writing"}]},"item_type_id":"8","owner":"1","path":["1"],"pubdate":{"attribute_name":"公開日","attribute_value":"2017-07-04"},"publish_date":"2017-07-04","publish_status":"0","recid":"48074","relation_version_is_last":true,"title":["Micro-structuring of epoxy resists containing nanoparticles by proton beam writing"],"weko_creator_id":"1","weko_shared_id":-1},"updated":"2023-05-15T23:32:15.913964+00:00"}