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Investigation of electrically-active deep levels in single-crystalline diamond by particle-induced charge transient spectroscopy
https://repo.qst.go.jp/records/47738
https://repo.qst.go.jp/records/47738c93445cc-f86d-4d7d-9c53-214d8aaa20ea
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2017-04-20 | |||||
| タイトル | ||||||
| タイトル | Investigation of electrically-active deep levels in single-crystalline diamond by particle-induced charge transient spectroscopy | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Kada, W.
× Kada, W.× Kambayashi, Y.× Ando, Yushi× Onoda, Shinobu× Umezawa, H.× Mokuno, Y.× Shikata, S.× Makino, Takahiro× Koka, M.× Hanaizumi, O.× Kamiya, Tomihiro× Oshima, Takeshi× 安藤 裕士× 小野田 忍× 牧野 高紘× 神谷 富裕× 大島 武 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | To investigate electrically-active deep levels in high-resistivity single-crystalline diamond, particleinduced charge transient spectroscopy (QTS) techniques were performed using 5.5 MeV alpha particles and 9 MeV carbon focused microprobes. For unintentionally-doped (UID) chemical vapor deposition (CVD) diamond, deep levels with activation energies of 0.35 eV and 0.43 eV were detected which correspond to the activation energy of boron acceptors in diamond. The results suggested that alpha particle and heavy ion induced QTS techniques are the promising candidate for in-situ investigation of deep levels in high-resistivity semiconductors. |
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| 書誌情報 |
Nuclear Instruments and Methods in Physics Research B 巻 372, p. 151-155, 発行日 2016-01 |
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| 出版者 | ||||||
| 出版者 | Elsevier | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1016/j.nimb.2015.12.044 | |||||
