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  1. 原著論文

M-center in 4H-SiC: Isothermal DLTS and first principles modeling studies

https://repo.qst.go.jp/records/85240
https://repo.qst.go.jp/records/85240
cc2a43b4-bd87-4d3a-a311-79e0c5f5e516
Item type 学術雑誌論文 / Journal Article(1)
公開日 2022-03-14
タイトル
タイトル M-center in 4H-SiC: Isothermal DLTS and first principles modeling studies
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
アクセス権
アクセス権 metadata only access
アクセス権URI http://purl.org/coar/access_right/c_14cb
著者 Capan, I.

× Capan, I.

WEKO 1039100

Capan, I.

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Brodar, T.

× Brodar, T.

WEKO 1039101

Brodar, T.

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Bernat, R.

× Bernat, R.

WEKO 1039102

Bernat, R.

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Ž., Pastuović

× Ž., Pastuović

WEKO 1039103

Ž., Pastuović

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Takahiro, Makino

× Takahiro, Makino

WEKO 1039104

Takahiro, Makino

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Takeshi, Ohshima

× Takeshi, Ohshima

WEKO 1039105

Takeshi, Ohshima

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D. Gouveia, J.

× D. Gouveia, J.

WEKO 1039106

D. Gouveia, J.

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Coutinho, J.

× Coutinho, J.

WEKO 1039107

Coutinho, J.

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Takahiro, Makino

× Takahiro, Makino

WEKO 1039108

en Takahiro, Makino

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Takeshi, Ohshima

× Takeshi, Ohshima

WEKO 1039109

en Takeshi, Ohshima

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抄録
内容記述タイプ Abstract
内容記述 We report on a bistable defect known as M-center, here introduced in n-type 4H-SiC by 2 MeV He ion implantation. Deep levels of the M-center are investigated by means of junction spectroscopy techniques, namely, deep level transient spectroscopy (DLTS) and isothermal DLTS. In addition to previously reported three deep levels arising from the M-center (labeled as M1, M2, and M3), we provide direct evidence on the existence of a fourth transition (labeled as M4) with an activation energy of 0.86 eV. Activation energies and apparent capture cross sections for all four metastable defects are determined. From first-principles calculations, it is shown that the observed features of the M-center, including the charge state character, transition levels, bi-stability dynamics, and annealing, are all accounted for by a carbon self-interstitial.
書誌情報 Journal of Applied Physics

巻 130, 号 12, 発行日 2021-09
出版者
出版者 AIP Publishing
ISSN
収録物識別子タイプ ISSN
収録物識別子 0021-8979
DOI
識別子タイプ DOI
関連識別子 10.1063/5.0064958
関連サイト
識別子タイプ URI
関連識別子 https://aip.scitation.org/doi/pdf/10.1063/5.0064958
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