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Soft x-ray laser beamline for surface processing and damage studies
https://repo.qst.go.jp/records/79899
https://repo.qst.go.jp/records/7989977418817-c86f-4045-a800-9780ad385d59
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2020-04-17 | |||||
| タイトル | ||||||
| タイトル | Soft x-ray laser beamline for surface processing and damage studies | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Ishino, Masahiko
× Ishino, Masahiko× Dinh, Thanhhung× Hosaka, Yuji× Hasegawa, Noboru× Yoshimura, Kimio× Yamamoto, Hiroki× Hatano, Tadashi× Higashiguchi, Takeshi× Sakaue, Kazuyuki× Ichimaru, Satoshi× Hatayama, Masatoshi× Sasaki, Akira× Washio, Masakazu× Nishikino, Masaharu× Maekawa, Yasunari× Ishino, Masahiko× Dinh, Thanhhung× Hosaka, Yuji× Hasegawa, Noboru× Yoshimura, Kimio× Yamamoto, Hiroki× Sasaki, Akira× Nishikino, Masaharu× Maekawa, Yasunari |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We have developed a soft x-ray laser (SXRL) beamline equipped with an intensity monitor dedicated to the ablation study such as surface processing and damage formation. To get the correct irradiation energy/fluence, an intensity monitor composed of a Mo/Si multilayer beam splitter and an x-ray charge-coupled device camera has been installed in the beamline. Mo/Si multilayer beam splitter has a large polarization dependence in the reflectivity around the incident angle of 45 deg. However, by evaluating the relationship between reflectivity and transmittance of the beam splitter appropriately, the irradiation energy onto the sample surface can be derived from the energy acquired by the intensity monitor. This SXRL beamline is available to not only the ablation phenomena but also the performance evaluation of soft x-ray optics and resists. | |||||
| 書誌情報 |
Applied Optics 巻 59, 号 12, p. 3692-3698, 発行日 2020-04 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 1559-128X | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1364/AO.387792 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.osapublishing.org/ao/abstract.cfm?uri=ao-59-12-3692 | |||||
