量研学術機関リポジトリ「QST-Repository」は、国立研究開発法人 量子科学技術研究開発機構に所属する職員等が生み出した学術成果（学会誌発表論文、学会発表、研究開発報告書、特許等）を集積しインターネット上で広く公開するサービスです。 Welcome to QST-Repository where we accumulates and discloses the academic research results(Journal Publications, Conference presentation, Research and Development Report, Patent, etc.) of the members of National Institutes for Quantum Science and Technology.
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In this study, we proposed a novel membrane-supported large-scale integration (LSI) with integrated heater and temperature monitor for on-site annealing-recovery from TID (total ionizing dose) effect with low energy consumption, aiming at solving the problem of integrated circuit (IC) damage by gamma ray irradiation. The heater and membrane structure were fabricated around an LSI by using MEMS (micro electromechanical systems) technology. The thermal characteristics of the microheater was studied for temperature monitoring to ensure an appropriate recovery temperature. 20 kGy gamma-ray irradiation was performed on the LSI samples and then the irradiated samples were annealed for recovery by the integrated microheater. It was found that the driving current of the LSI decreased after irradiation and almost recovered to the original level after 15-minutes annealing at 300°C. We report, for the first time, the successful recovery of the LSI from 20 kGy gamma-ray TID damage by using the integrated heater and temperature monitor.
Membrane-supported LSI with integrated heater and temperature monitor for on-site annealing-recovery from 20 kGy gamma ray irradiation damage
