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Short pulse soft x-ray laser ablation research
https://repo.qst.go.jp/records/83100
https://repo.qst.go.jp/records/83100bbf83017-83cd-45bd-a28e-ce33d9d6d7fc
| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2021-07-09 | |||||
| タイトル | ||||||
| タイトル | Short pulse soft x-ray laser ablation research | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
| 資源タイプ | conference paper | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Masahiko, Ishino
× Masahiko, Ishino× Dinh, Thanhhung× Katsuhiro, Mikami× Noboru, Hasegawa× Masaharu, Nishikino× Masahiko, Ishino× Dinh, Thanhhung× Noboru, Hasegawa× Masaharu, Nishikino |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The short pulse laser ablation have been extensively studied for confirmation and discussion of damage formation including estimations of damage thresholds and probabilities of surface machining. Irradiation examines by the femtosecond soft x-ray laser reveals formations of smooth craters on silica glass surfaces, and the appropriate selection of the laser wavelength can make the nanometer size modification on silicon surface in the vicinity of the damage threshold. On the other hand, we also revealed that damage thresholds and modification structures obtained by the picosecond soft x-ray laser irradiation provide the same results as the femtosecond soft x-ray laser. This means that not only femtosecond but also picosecond soft x-ray laser irradiation experiments can be contribute to deep understandings of the ablation phenomena. | |||||
| 書誌情報 |
Proceedings of SPIE 巻 11886, p. 118860R-1-118860R-5, 発行日 2021-07 |
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| 出版者 | ||||||
| 出版者 | SPIE | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 1996-756X | |||||
| ISBN | ||||||
| 識別子タイプ | ISBN | |||||
| 関連識別子 | 9781510646193 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1117/12.2591909 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/11886.toc | |||||
