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Effect of crystallization of Ni catalyst on direct precipitation of multilayer graphene using W capping layer
https://repo.qst.go.jp/records/81321
https://repo.qst.go.jp/records/81321720966a3-d16a-4eba-a885-391746c13e95
Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2020-12-14 | |||||
タイトル | ||||||
タイトル | Effect of crystallization of Ni catalyst on direct precipitation of multilayer graphene using W capping layer | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
Yamada, Jumpei
× Yamada, Jumpei× Ueda, Yuki× Maruyama, Takahiro× Fujikawa, Seiji× Sasaki, Takuo× Takahashi, Masamitsu× Naritsuka, Shigeya× Seiji, Fujikawa× Takuo, Sasaki× Masamitsu, Takahashi |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | In recent years, graphene growth technology has been greatly progressed, and it is possible to grow graphene with millimeter-size single crystals using metal-catalysis CVD. However, the transfer process is unavoidably which largely deteriorates the graphene. We have proposed direct precipitation method of graphene using a W capping layer. The method does not only require a transfer process, but also the introduction of wrinkles will be suppressed by optimizing the cooling rate at the graphene precipitation. The growth conditions such as thickness of amorphous carbon, annealing temperature, cooling rate and crystallinity of Ni catalyst were systematically changed to study the mechanism of the precipitation method using the W cap layer. By the optimization of the conditions, wrinkle-free multilayer graphene with D/G ratio of less than 0.1 were successfully obtained directly on a sapphire substrate. |
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書誌情報 |
Journal of Crystal Growth 巻 555, p. 125969, 発行日 2020-12 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0022-0248 | |||||
DOI | ||||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1016/j.jcrysgro.2020.125969 | |||||
関連サイト | ||||||
識別子タイプ | URI | |||||
関連識別子 | https://www.sciencedirect.com/science/article/pii/S0022024820304929 |