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Ablation threshold and crater morphology of amorphous and crystalline SiO2 glass for extreme ultraviolet femtosecond pulses
https://repo.qst.go.jp/records/81079
https://repo.qst.go.jp/records/81079de912cc6-04ac-44b0-92a4-f09c077ebc44
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2020-11-24 | |||||
| タイトル | ||||||
| タイトル | Ablation threshold and crater morphology of amorphous and crystalline SiO2 glass for extreme ultraviolet femtosecond pulses | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Shibuya, Tatsunori
× Shibuya, Tatsunori× Sakaue, Kazuyuki× Ogawa , Hiroshi× Dinh, Thanhhung× Satoh, Daisuke× Terasawa, Eichi× Washio, Masakazu× Tanaka, Masahito× Higashiguchi, Takeshi× Ishino, Masahiko× Kubota, Yuya× Inubushi, Yuichi× Owada, Shigeki× Nishikino, Masaharu× Kobayashi, Yohei× Kuroda, Ryunosuke× Dinh, Thanhhung× Masahiko, Ishino× Masaharu, Nishikino |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The ablation threshold fluence and crater morphology of amorphous and crystalline SiO2 glass were analyzed in the regime of an extreme ultraviolet femtosecond pulse. Despite the difference between the densities (or optical penetration depths) of amorphous and crystalline SiO2 glass, the ablation threshold fluences and crater morphologies were found to be comparable. In addition, we compared our experimental results at a 10.3 nm wavelength with those in a previous work at a 13.5 nm wavelength. We conclude that the impact of the difference in density or optical penetration depth of several tens of percent on the ablation process is limited. | |||||
| 書誌情報 |
Japanese Journal of Applied Physics 巻 59, 号 12, p. 122004, 発行日 2020-11 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0021-4922 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.35848/1347-4065/abc85a | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://iopscience.iop.org/article/10.35848/1347-4065/abc85a | |||||
