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Recent developments in soft X-ray emission spectroscopy microscopy
https://repo.qst.go.jp/records/80523
https://repo.qst.go.jp/records/805238ae6f15f-6d71-4c0b-a69a-c160d672c59d
| Item type | 会議発表論文 / Conference Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2020-09-15 | |||||
| タイトル | ||||||
| タイトル | Recent developments in soft X-ray emission spectroscopy microscopy | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_5794 | |||||
| 資源タイプ | conference paper | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
寺内, 正己
× 寺内, 正己× 羽多野, 忠× 小池, 雅人× ピロジコフ, アレキサンダー× 笹井, 浩行× 長野, 哲也× 高倉, 優× 村野, 孝則× Koike, Masato× Pirozhkov, Alexander |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | This paper discusses the path to the commercialization of a soft-X-ray emission spectrometer system for EPMA/SEM, its application, how it can be used to investigate new materials, and offers an update on improvements being investigated to further optimise the performance. The ultimate energy resolution of 0.08 eV at Al L- Fermi edge is shown with current optics using a fine pixel detector. The spectral mapping technique can show chemical shift images by using an appropriate region-of-interest energy window. L-emissions of 3d transition metal elements inform one not only of the density of states of bonding but also the number of outer shell or 3d electrons. Furthermore, progress leading to improvements in the detection efficiency has resulted in more than three times increase in the B K-emission peak. Testing and evaluation of new high energy-resolution spectrometer for EPMA, and a new calibration procedure for C K-peak on graphite has resulted in improved energy calibration procedure is presented. | |||||
| 書誌情報 |
IOP Conference Series: Materials Science and Engineering 巻 891, p. 012022, 発行日 2020-08 |
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| 出版者 | ||||||
| 出版者 | IOP Publishing Ltd | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1088/1757-899X/891/1/012022 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://iopscience.iop.org/article/10.1088/1757-899X/891/1/012022/pdf | |||||
