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Secondary ion mass spectrometry using energetic cluster ion beams: Toward highly sensitive imaging mass spectrometry
https://repo.qst.go.jp/records/80445
https://repo.qst.go.jp/records/804457c0d9079-4524-4b81-87bc-ddeaedf9366b
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2020-07-10 | |||||
| タイトル | ||||||
| タイトル | Secondary ion mass spectrometry using energetic cluster ion beams: Toward highly sensitive imaging mass spectrometry | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
平田, 浩一(産総研)
× 平田, 浩一(産総研)× Yamada, Keisuke× Chiba, Atsuya× Hirano, Yoshimi× Saito, Yuuichi× Yamada, Keisuke× Chiba, Atsuya× Hirano, Yoshimi× Saito, Yuuichi |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | Imaging mass spectrometry (IMS), based on linking mass-analysis data for ions and their original positions in a sample, allows the visualization of the spatial distribution of atomic and/or molecular species in the sample, and is therefore an essential analytical method for the characterization of chemical and biological materials. For sensitive elemental and chemical imaging using IMS, a sufficient amount of ions to be analyzed should be supplied from the analyzing area on the sample surface. Secodnary ion mass spectrometry (SIMS) using energetic cluster ions (ECIs) with energies of sub-MeV and above as primary ions (ECI-SIMS) can provide the secondary ions necessary for the characterization of organic materials with high emission yields. Hence, ECI-SIMS is a good method for highly sensitive IMS. We report recent progress in ECI beam manipulation techniques for applications of ECI-SIMS to highly sensitive IMS together with the characteristics of ECI impacts on organic materials. | |||||
| 書誌情報 |
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 巻 479, p. 240-245, 発行日 2020-09 |
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| 出版者 | ||||||
| 出版者 | Elsevier | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0168-583X | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1016/j.nimb.2020.06.027 | |||||
| 関連サイト | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1016/j.nimb.2020.06.027 | |||||
