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Initial oxidation kinetics of Si(113)-(3×2) investigated using supersonic seeded molecular beams
https://repo.qst.go.jp/records/80339
https://repo.qst.go.jp/records/8033912415df4-532e-4c87-a8b8-db994520bc2f
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2020-08-19 | |||||
| タイトル | ||||||
| タイトル | Initial oxidation kinetics of Si(113)-(3×2) investigated using supersonic seeded molecular beams | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | metadata only access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
| 著者 |
Teraoka, Yuuden
× Teraoka, Yuuden× Yoshigoe, Akitaka× 吉越, 章隆× Yuuden, Teraoka× Akitaka, Yoshigoe |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The initial oxidation of silicon surfaces with (113) orientation has been investigated using high-resolution photoelectron spectroscopy with synchrotron radiation. In the present study, we investigated both the Si 2p state and the O 1s state to evaluate the oxide thickness and composition, and to assess the strain at the SiO2/Si interface. The oxidized components in the Si 2p state (Si1+, Si2+, Si3+, Si4+) were analyzed. In the O 1s state, a low-binding-energy component (LBC) and a high-binding-energy component (HBC) were analyzed. To investigate the non-thermal oxidation process, we utilized supersonic seeded molecular beam (SSMB) to obtain oxygen molecules with high translational kinetic energies (Et). We demonstrate that the oxide quality and oxidation kinetics are largely altered by changing the value of Et. | |||||
| 書誌情報 |
Surface Science 巻 697, p. 121600, 発行日 2020-07 |
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| 出版者 | ||||||
| 出版者 | Elsevier B.V. | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 0039-6028 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1016/j.susc.2020.1216000 | |||||
| 関連サイト | ||||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.sciencedirect.com/science/article/abs/pii/S0039602819309380 | |||||
